Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe t...
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Taylor & Francis Group
2025-08-01
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| Series: | Science and Technology of Advanced Materials |
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| Online Access: | https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779 |
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| author | T. Tsuji S. Harada T. Teraji |
| author_facet | T. Tsuji S. Harada T. Teraji |
| author_sort | T. Tsuji |
| collection | DOAJ |
| description | We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the x = [100], y = [010], z = [001] coordinate system. Regarding the components of the shear stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study had mainly shear stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film. |
| format | Article |
| id | doaj-art-cee087a11f274d39995ecb5449a873e1 |
| institution | Kabale University |
| issn | 1468-6996 1878-5514 |
| language | English |
| publishDate | 2025-08-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Science and Technology of Advanced Materials |
| spelling | doaj-art-cee087a11f274d39995ecb5449a873e12025-08-20T04:03:16ZengTaylor & Francis GroupScience and Technology of Advanced Materials1468-69961878-55142025-08-0110.1080/14686996.2025.2546779Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensorT. Tsuji0S. Harada1T. Teraji2National Institute for Materials Science, Tsukuba, Ibaraki, JapanNagoya University, Nagoya, JapanNational Institute for Materials Science, Tsukuba, Ibaraki, JapanWe measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the x = [100], y = [010], z = [001] coordinate system. Regarding the components of the shear stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study had mainly shear stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film.https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779CVD diamondnitrogen dopeNV centerstress |
| spellingShingle | T. Tsuji S. Harada T. Teraji Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor Science and Technology of Advanced Materials CVD diamond nitrogen dope NV center stress |
| title | Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor |
| title_full | Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor |
| title_fullStr | Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor |
| title_full_unstemmed | Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor |
| title_short | Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor |
| title_sort | measuring the stress tensor in nitrogen doped cvd diamond using solid state quantum sensor |
| topic | CVD diamond nitrogen dope NV center stress |
| url | https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779 |
| work_keys_str_mv | AT ttsuji measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor AT sharada measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor AT tteraji measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor |