Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor

We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe t...

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Main Authors: T. Tsuji, S. Harada, T. Teraji
Format: Article
Language:English
Published: Taylor & Francis Group 2025-08-01
Series:Science and Technology of Advanced Materials
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Online Access:https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779
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author T. Tsuji
S. Harada
T. Teraji
author_facet T. Tsuji
S. Harada
T. Teraji
author_sort T. Tsuji
collection DOAJ
description We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the x = [100], y = [010], z = [001] coordinate system. Regarding the components of the shear stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study had mainly shear stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film.
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institution Kabale University
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spelling doaj-art-cee087a11f274d39995ecb5449a873e12025-08-20T04:03:16ZengTaylor & Francis GroupScience and Technology of Advanced Materials1468-69961878-55142025-08-0110.1080/14686996.2025.2546779Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensorT. Tsuji0S. Harada1T. Teraji2National Institute for Materials Science, Tsukuba, Ibaraki, JapanNagoya University, Nagoya, JapanNational Institute for Materials Science, Tsukuba, Ibaraki, JapanWe measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the x = [100], y = [010], z = [001] coordinate system. Regarding the components of the shear stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study had mainly shear stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film.https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779CVD diamondnitrogen dopeNV centerstress
spellingShingle T. Tsuji
S. Harada
T. Teraji
Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
Science and Technology of Advanced Materials
CVD diamond
nitrogen dope
NV center
stress
title Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
title_full Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
title_fullStr Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
title_full_unstemmed Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
title_short Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor
title_sort measuring the stress tensor in nitrogen doped cvd diamond using solid state quantum sensor
topic CVD diamond
nitrogen dope
NV center
stress
url https://www.tandfonline.com/doi/10.1080/14686996.2025.2546779
work_keys_str_mv AT ttsuji measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor
AT sharada measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor
AT tteraji measuringthestresstensorinnitrogendopedcvddiamondusingsolidstatequantumsensor