An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments

An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments

Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) method for measuring...

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Bibliographic Details
Main Authors:	Jae Hwan Lee, Chunrong Jia, Yong Doo Kim, Hong Hyun Kim, Tien Thang Pham, Young Seok Choi, Young Un Seo, Ike Woo Lee
Format:	Article
Language:	English
Published:	Wiley 2012-01-01
Series:	International Journal of Analytical Chemistry
Online Access:	http://dx.doi.org/10.1155/2012/690356
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