A Review of Three-Dimensional Electric Field Sensors

Three-dimensional electric field sensors (3D EFSs) can simultaneously measure electric field components in three mutually orthogonal directions and comprehensively capture the spatial distribution and dynamic changes of the electric field. They can be widely used in atmospheric science, smart grids,...

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Main Authors: Xiaonan Li, Yu Gu, Zehao Li, Zijian He, Pengfei Yang, Chunrong Peng
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/16/7/737
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author Xiaonan Li
Yu Gu
Zehao Li
Zijian He
Pengfei Yang
Chunrong Peng
author_facet Xiaonan Li
Yu Gu
Zehao Li
Zijian He
Pengfei Yang
Chunrong Peng
author_sort Xiaonan Li
collection DOAJ
description Three-dimensional electric field sensors (3D EFSs) can simultaneously measure electric field components in three mutually orthogonal directions and comprehensively capture the spatial distribution and dynamic changes of the electric field. They can be widely used in atmospheric science, smart grids, aerospace, target detection, and other fields. This paper deeply analyzes the latest progress in 3D EFSs, focusing on four major types of sensors: DC field mill, electro-optic effect, capacitive sensing, and microelectromechanical system (MEMS). It elaborates on their working principles, structural design, and decoupling calibration methods. At the same time, the advantages and disadvantages of various types of 3D EFSs and their applications in different fields are analyzed. Finally, the challenges faced by 3D EFS technology and its future development direction are discussed.
format Article
id doaj-art-cdd94c47cb574ed596e4a65a73b40218
institution DOAJ
issn 2072-666X
language English
publishDate 2025-06-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj-art-cdd94c47cb574ed596e4a65a73b402182025-08-20T03:08:10ZengMDPI AGMicromachines2072-666X2025-06-0116773710.3390/mi16070737A Review of Three-Dimensional Electric Field SensorsXiaonan Li0Yu Gu1Zehao Li2Zijian He3Pengfei Yang4Chunrong Peng5School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, ChinaThree-dimensional electric field sensors (3D EFSs) can simultaneously measure electric field components in three mutually orthogonal directions and comprehensively capture the spatial distribution and dynamic changes of the electric field. They can be widely used in atmospheric science, smart grids, aerospace, target detection, and other fields. This paper deeply analyzes the latest progress in 3D EFSs, focusing on four major types of sensors: DC field mill, electro-optic effect, capacitive sensing, and microelectromechanical system (MEMS). It elaborates on their working principles, structural design, and decoupling calibration methods. At the same time, the advantages and disadvantages of various types of 3D EFSs and their applications in different fields are analyzed. Finally, the challenges faced by 3D EFS technology and its future development direction are discussed.https://www.mdpi.com/2072-666X/16/7/7373D EFSsprinciple and designdecoupling calibration methodssensitivity and resolution
spellingShingle Xiaonan Li
Yu Gu
Zehao Li
Zijian He
Pengfei Yang
Chunrong Peng
A Review of Three-Dimensional Electric Field Sensors
Micromachines
3D EFSs
principle and design
decoupling calibration methods
sensitivity and resolution
title A Review of Three-Dimensional Electric Field Sensors
title_full A Review of Three-Dimensional Electric Field Sensors
title_fullStr A Review of Three-Dimensional Electric Field Sensors
title_full_unstemmed A Review of Three-Dimensional Electric Field Sensors
title_short A Review of Three-Dimensional Electric Field Sensors
title_sort review of three dimensional electric field sensors
topic 3D EFSs
principle and design
decoupling calibration methods
sensitivity and resolution
url https://www.mdpi.com/2072-666X/16/7/737
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