Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma

This study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O3) gas produced by corona discharge plasma using O2. Here, O3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on a...

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Main Authors: Ece Kutlu-Narin, Polat Narin, Sefer Bora Lisesivdin, Beyza Sarikavak-Lisesivdin
Format: Article
Language:English
Published: Wiley 2021-01-01
Series:Advances in Condensed Matter Physics
Online Access:http://dx.doi.org/10.1155/2021/1130829
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_version_ 1832564146857574400
author Ece Kutlu-Narin
Polat Narin
Sefer Bora Lisesivdin
Beyza Sarikavak-Lisesivdin
author_facet Ece Kutlu-Narin
Polat Narin
Sefer Bora Lisesivdin
Beyza Sarikavak-Lisesivdin
author_sort Ece Kutlu-Narin
collection DOAJ
description This study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O3) gas produced by corona discharge plasma using O2. Here, O3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on amorphous soda-lime glass (SLG) and single crystals SiO2/Si (100) and c-plane Al2O3 substrates at 350°C of low growth temperature. All ZnO thin films show dominant (0002) diffraction peaks from X-ray diffraction (XRD). As expected, full width at half maximum (FWHM) of (0002) is decreasing in ZnO thin films on single-crystal substrates, especially c-Al2O3 due to similar crystal structure. It is found that the strain in the films is lowest in ZnO/c-Al2O3. The surface morphologies of the thin films are studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Grown ZnO films have a hexagonal and triangular nanostructure with different nanostructure sizes depending on the used substrate types. The calculated surface roughness is dramatically decreased in ZnO/c-Al2O3 compared to the other grown structures. The confocal Raman measurements show the E2(H) peak of ZnO thin films at 437 cm−1. It is suggested that O3 gas produced by corona discharge plasma using O2 can be useful to obtain better crystal quality and physical properties in ZnO thin films.
format Article
id doaj-art-cce8154984d24f769a1bd59a2adfeade
institution Kabale University
issn 1687-8124
language English
publishDate 2021-01-01
publisher Wiley
record_format Article
series Advances in Condensed Matter Physics
spelling doaj-art-cce8154984d24f769a1bd59a2adfeade2025-02-03T01:11:40ZengWileyAdvances in Condensed Matter Physics1687-81242021-01-01202110.1155/2021/1130829Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge PlasmaEce Kutlu-Narin0Polat Narin1Sefer Bora Lisesivdin2Beyza Sarikavak-Lisesivdin3Department of Physics EngineeringDepartment of PhysicsDepartment of PhysicsDepartment of PhysicsThis study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O3) gas produced by corona discharge plasma using O2. Here, O3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on amorphous soda-lime glass (SLG) and single crystals SiO2/Si (100) and c-plane Al2O3 substrates at 350°C of low growth temperature. All ZnO thin films show dominant (0002) diffraction peaks from X-ray diffraction (XRD). As expected, full width at half maximum (FWHM) of (0002) is decreasing in ZnO thin films on single-crystal substrates, especially c-Al2O3 due to similar crystal structure. It is found that the strain in the films is lowest in ZnO/c-Al2O3. The surface morphologies of the thin films are studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Grown ZnO films have a hexagonal and triangular nanostructure with different nanostructure sizes depending on the used substrate types. The calculated surface roughness is dramatically decreased in ZnO/c-Al2O3 compared to the other grown structures. The confocal Raman measurements show the E2(H) peak of ZnO thin films at 437 cm−1. It is suggested that O3 gas produced by corona discharge plasma using O2 can be useful to obtain better crystal quality and physical properties in ZnO thin films.http://dx.doi.org/10.1155/2021/1130829
spellingShingle Ece Kutlu-Narin
Polat Narin
Sefer Bora Lisesivdin
Beyza Sarikavak-Lisesivdin
Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
Advances in Condensed Matter Physics
title Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
title_full Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
title_fullStr Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
title_full_unstemmed Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
title_short Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma
title_sort investigation of structural and optical properties of zno thin films grown on different substrates by mist cvd enhanced with ozone gas produced by corona discharge plasma
url http://dx.doi.org/10.1155/2021/1130829
work_keys_str_mv AT ecekutlunarin investigationofstructuralandopticalpropertiesofznothinfilmsgrownondifferentsubstratesbymistcvdenhancedwithozonegasproducedbycoronadischargeplasma
AT polatnarin investigationofstructuralandopticalpropertiesofznothinfilmsgrownondifferentsubstratesbymistcvdenhancedwithozonegasproducedbycoronadischargeplasma
AT seferboralisesivdin investigationofstructuralandopticalpropertiesofznothinfilmsgrownondifferentsubstratesbymistcvdenhancedwithozonegasproducedbycoronadischargeplasma
AT beyzasarikavaklisesivdin investigationofstructuralandopticalpropertiesofznothinfilmsgrownondifferentsubstratesbymistcvdenhancedwithozonegasproducedbycoronadischargeplasma