High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector
We design and experimentally demonstrate highly efficient Silicon Nitride based grating couplers with bottom distributed Bragg reflectors. All the layers were deposited using plasma enhanced chemical vapor deposition processing. We present gratings on two Silicon Nitride thickness (400 nm...
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IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/8808907/ |
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| author | Siddharth Nambiar Abhai Kumar Rakshitha Kallega Praveen Ranganath Shankar Kumar Selvaraja |
| author_facet | Siddharth Nambiar Abhai Kumar Rakshitha Kallega Praveen Ranganath Shankar Kumar Selvaraja |
| author_sort | Siddharth Nambiar |
| collection | DOAJ |
| description | We design and experimentally demonstrate highly efficient Silicon Nitride based grating couplers with bottom distributed Bragg reflectors. All the layers were deposited using plasma enhanced chemical vapor deposition processing. We present gratings on two Silicon Nitride thickness (400 nm and 500 nm) platforms. On a 500 nm thick Silicon Nitride, we show a peak coupling efficiency of <inline-formula><tex-math notation="LaTeX">$-$</tex-math></inline-formula>2.29 dB/coupler at a wavelength of 1573 nm with a 1 dB bandwidth of 49 nm. On a 400 nm thick platform, we demonstrate a coupling efficiency of <inline-formula><tex-math notation="LaTeX">$-$</tex-math></inline-formula>2.58 dB/coupler at 1576 nm with a 1 dB bandwidth of 52 nm. The demonstrated coupling efficiency is the best reported as yet, for both 400 nm and 500 nm thick, plasma deposited Silicon Nitride platforms. |
| format | Article |
| id | doaj-art-cc2116ee8a30491b94e47c91bc01d883 |
| institution | DOAJ |
| issn | 1943-0655 |
| language | English |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-cc2116ee8a30491b94e47c91bc01d8832025-08-20T03:15:48ZengIEEEIEEE Photonics Journal1943-06552019-01-0111511310.1109/JPHOT.2019.29364308808907High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom ReflectorSiddharth Nambiar0https://orcid.org/0000-0001-5676-1341Abhai Kumar1https://orcid.org/0000-0001-7667-6152Rakshitha Kallega2https://orcid.org/0000-0001-5439-5042Praveen Ranganath3https://orcid.org/0000-0002-6959-5538Shankar Kumar Selvaraja4https://orcid.org/0000-0003-2670-7058Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, IndiaCentre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, IndiaCentre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, IndiaCentre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, IndiaCentre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, IndiaWe design and experimentally demonstrate highly efficient Silicon Nitride based grating couplers with bottom distributed Bragg reflectors. All the layers were deposited using plasma enhanced chemical vapor deposition processing. We present gratings on two Silicon Nitride thickness (400 nm and 500 nm) platforms. On a 500 nm thick Silicon Nitride, we show a peak coupling efficiency of <inline-formula><tex-math notation="LaTeX">$-$</tex-math></inline-formula>2.29 dB/coupler at a wavelength of 1573 nm with a 1 dB bandwidth of 49 nm. On a 400 nm thick platform, we demonstrate a coupling efficiency of <inline-formula><tex-math notation="LaTeX">$-$</tex-math></inline-formula>2.58 dB/coupler at 1576 nm with a 1 dB bandwidth of 52 nm. The demonstrated coupling efficiency is the best reported as yet, for both 400 nm and 500 nm thick, plasma deposited Silicon Nitride platforms.https://ieeexplore.ieee.org/document/8808907/Grating couplerssilicon nitridewaveguides |
| spellingShingle | Siddharth Nambiar Abhai Kumar Rakshitha Kallega Praveen Ranganath Shankar Kumar Selvaraja High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector IEEE Photonics Journal Grating couplers silicon nitride waveguides |
| title | High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector |
| title_full | High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector |
| title_fullStr | High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector |
| title_full_unstemmed | High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector |
| title_short | High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector |
| title_sort | high efficiency grating coupler in 400 x00a0 nm and 500 x00a0 nm pecvd silicon nitride with bottom reflector |
| topic | Grating couplers silicon nitride waveguides |
| url | https://ieeexplore.ieee.org/document/8808907/ |
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