Research on high-precision large-aperture laser differential confocal-interferometric optical element multi-parameter measurement method
To fulfill the requirements of high-precision common baseline measurement for multiple parameters, such as surface profiling and the curvature radius of large-aperture optical elements on the same instrument, this paper proposes a research on a high-precision large-aperture laser differential confoc...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Light Publishing Group
2025-01-01
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| Series: | Light: Advanced Manufacturing |
| Subjects: | |
| Online Access: | https://www.light-am.com/article/doi/10.37188/lam.2024.047 |
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