Structural Properties and Elemental Composition of Au+ Implanted ZnO Films, Obtained by Sol-gel Method

Structural Properties and Elemental Composition of Au+ Implanted ZnO Films, Obtained by Sol-gel Method

The undoped and doped aluminum ZnO films were obtained by sol-gel method onto glass substrates with further implantation of Au+ ions. RBS, XRD methods and Raman spectroscopy were used for films characterization. The XRD analysis showed that obtained samples have a hexagonal structure with lattice co...

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Bibliographic Details
Main Authors: A.D. Pogrebnjak, T.O. Berestok, A.S. Opanasyuk, Y. Takeda, K. Oyoshi, F.F. Komarov, J. Kassi
Format: Article
Language:English
Published: Sumy State University 2014-06-01
Series:Журнал нано- та електронної фізики
Subjects:
ZnO : Al
Implantation Au+
Sol-gel method
RBS
Raman investigation
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02003.pdf
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