Integrated structure for a resonant micro-gyroscope and accelerometer

This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external accele...

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Main Authors: V. Zega, C. Comi, A. Corigliano, C. Valzasina
Format: Article
Language:English
Published: Gruppo Italiano Frattura 2014-07-01
Series:Fracture and Structural Integrity
Subjects:
Online Access:http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdf
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author V. Zega
C. Comi
A. Corigliano
C. Valzasina
author_facet V. Zega
C. Comi
A. Corigliano
C. Valzasina
author_sort V. Zega
collection DOAJ
description This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.
format Article
id doaj-art-cba09b72f6e74190ab3fe067ff27193f
institution Kabale University
issn 1971-8993
1971-8993
language English
publishDate 2014-07-01
publisher Gruppo Italiano Frattura
record_format Article
series Fracture and Structural Integrity
spelling doaj-art-cba09b72f6e74190ab3fe067ff27193f2025-02-03T10:39:37ZengGruppo Italiano FratturaFracture and Structural Integrity1971-89931971-89932014-07-0182933434210.3221/IGF-ESIS.29.29Integrated structure for a resonant micro-gyroscope and accelerometerV. Zega0C. Comi1A. Corigliano2C. Valzasina3Politecnico di MilanoPolitecnico di MilanoPolitecnico di MilanoAMS DivisionThis paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdfMEMS; Gyroscope; Accelerometer; Resonators.
spellingShingle V. Zega
C. Comi
A. Corigliano
C. Valzasina
Integrated structure for a resonant micro-gyroscope and accelerometer
Fracture and Structural Integrity
MEMS; Gyroscope; Accelerometer; Resonators.
title Integrated structure for a resonant micro-gyroscope and accelerometer
title_full Integrated structure for a resonant micro-gyroscope and accelerometer
title_fullStr Integrated structure for a resonant micro-gyroscope and accelerometer
title_full_unstemmed Integrated structure for a resonant micro-gyroscope and accelerometer
title_short Integrated structure for a resonant micro-gyroscope and accelerometer
title_sort integrated structure for a resonant micro gyroscope and accelerometer
topic MEMS; Gyroscope; Accelerometer; Resonators.
url http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdf
work_keys_str_mv AT vzega integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT ccomi integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT acorigliano integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT cvalzasina integratedstructureforaresonantmicrogyroscopeandaccelerometer