Integrated structure for a resonant micro-gyroscope and accelerometer
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external accele...
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| Format: | Article |
| Language: | English |
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Gruppo Italiano Frattura
2014-07-01
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| Series: | Fracture and Structural Integrity |
| Subjects: | |
| Online Access: | http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdf |
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| _version_ | 1832544297895854080 |
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| author | V. Zega C. Comi A. Corigliano C. Valzasina |
| author_facet | V. Zega C. Comi A. Corigliano C. Valzasina |
| author_sort | V. Zega |
| collection | DOAJ |
| description | This paper presents the study of the mechanical behavior of a microstructure designed to detect
acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the
ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one
in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)
on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,
provides a differential decoupled detection of four external quantities thanks to the presence of four slender
beams resonating in bending and four torsional resonators. |
| format | Article |
| id | doaj-art-cba09b72f6e74190ab3fe067ff27193f |
| institution | Kabale University |
| issn | 1971-8993 1971-8993 |
| language | English |
| publishDate | 2014-07-01 |
| publisher | Gruppo Italiano Frattura |
| record_format | Article |
| series | Fracture and Structural Integrity |
| spelling | doaj-art-cba09b72f6e74190ab3fe067ff27193f2025-02-03T10:39:37ZengGruppo Italiano FratturaFracture and Structural Integrity1971-89931971-89932014-07-0182933434210.3221/IGF-ESIS.29.29Integrated structure for a resonant micro-gyroscope and accelerometerV. Zega0C. Comi1A. Corigliano2C. Valzasina3Politecnico di MilanoPolitecnico di MilanoPolitecnico di MilanoAMS DivisionThis paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdfMEMS; Gyroscope; Accelerometer; Resonators. |
| spellingShingle | V. Zega C. Comi A. Corigliano C. Valzasina Integrated structure for a resonant micro-gyroscope and accelerometer Fracture and Structural Integrity MEMS; Gyroscope; Accelerometer; Resonators. |
| title | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_full | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_fullStr | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_full_unstemmed | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_short | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_sort | integrated structure for a resonant micro gyroscope and accelerometer |
| topic | MEMS; Gyroscope; Accelerometer; Resonators. |
| url | http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdf |
| work_keys_str_mv | AT vzega integratedstructureforaresonantmicrogyroscopeandaccelerometer AT ccomi integratedstructureforaresonantmicrogyroscopeandaccelerometer AT acorigliano integratedstructureforaresonantmicrogyroscopeandaccelerometer AT cvalzasina integratedstructureforaresonantmicrogyroscopeandaccelerometer |