Integrated structure for a resonant micro-gyroscope and accelerometer
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external accele...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Gruppo Italiano Frattura
2014-07-01
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| Series: | Fracture and Structural Integrity |
| Subjects: | |
| Online Access: | http://www.gruppofrattura.it/pdf/rivista/numero29/numero_29_art_29.pdf |
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| Summary: | This paper presents the study of the mechanical behavior of a microstructure designed to detect
acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the
ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one
in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)
on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,
provides a differential decoupled detection of four external quantities thanks to the presence of four slender
beams resonating in bending and four torsional resonators. |
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| ISSN: | 1971-8993 1971-8993 |