MEMS Varifocal Optical Elements for Focus Control
As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optic...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/4/482 |
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