MEMS Varifocal Optical Elements for Focus Control
As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optic...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/4/482 |
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| author | Chen Liu Tong Wang Xin Wang Manpeng Chang Yu Jian Weimin Wang |
| author_facet | Chen Liu Tong Wang Xin Wang Manpeng Chang Yu Jian Weimin Wang |
| author_sort | Chen Liu |
| collection | DOAJ |
| description | As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on light control mechanisms, MEMS varifocal optical elements are divided into three categories: reflective varifocal mirrors, varifocal microlenses, and phased varifocal mirrors. A novel indicator is introduced to evaluate and compare the performance of MEMS varifocal optical elements. A wide range of applications is also discussed. This review can serve as a reference for relevant researchers and engineers. |
| format | Article |
| id | doaj-art-cab4eb63afbe4368b4844a071deb8b59 |
| institution | OA Journals |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-cab4eb63afbe4368b4844a071deb8b592025-08-20T02:18:10ZengMDPI AGMicromachines2072-666X2025-04-0116448210.3390/mi16040482MEMS Varifocal Optical Elements for Focus ControlChen Liu0Tong Wang1Xin Wang2Manpeng Chang3Yu Jian4Weimin Wang5Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, ChinaAs microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on light control mechanisms, MEMS varifocal optical elements are divided into three categories: reflective varifocal mirrors, varifocal microlenses, and phased varifocal mirrors. A novel indicator is introduced to evaluate and compare the performance of MEMS varifocal optical elements. A wide range of applications is also discussed. This review can serve as a reference for relevant researchers and engineers.https://www.mdpi.com/2072-666X/16/4/482MOEMSfocus controlvarifocal mirrortunable lensmicro-optical system |
| spellingShingle | Chen Liu Tong Wang Xin Wang Manpeng Chang Yu Jian Weimin Wang MEMS Varifocal Optical Elements for Focus Control Micromachines MOEMS focus control varifocal mirror tunable lens micro-optical system |
| title | MEMS Varifocal Optical Elements for Focus Control |
| title_full | MEMS Varifocal Optical Elements for Focus Control |
| title_fullStr | MEMS Varifocal Optical Elements for Focus Control |
| title_full_unstemmed | MEMS Varifocal Optical Elements for Focus Control |
| title_short | MEMS Varifocal Optical Elements for Focus Control |
| title_sort | mems varifocal optical elements for focus control |
| topic | MOEMS focus control varifocal mirror tunable lens micro-optical system |
| url | https://www.mdpi.com/2072-666X/16/4/482 |
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