Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
A method for the dense integration of one-dimensional (1-D) photonic crystal nanobeam cavity (PCNC) based integrated sensor array (1-D-PCNC-ISA) is proposed. The 1-D-PCNC-ISA consists of multiple parallel-connected sensing channels with airgap separations. On each channel, only a single flexible 1-D...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7938311/ |
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