Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor

A method for the dense integration of one-dimensional (1-D) photonic crystal nanobeam cavity (PCNC) based integrated sensor array (1-D-PCNC-ISA) is proposed. The 1-D-PCNC-ISA consists of multiple parallel-connected sensing channels with airgap separations. On each channel, only a single flexible 1-D...

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Main Authors: Daquan Yang, Bo Wang, Xin Chen, Chuan Wang, Yuefeng Ji
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/7938311/
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author Daquan Yang
Bo Wang
Xin Chen
Chuan Wang
Yuefeng Ji
author_facet Daquan Yang
Bo Wang
Xin Chen
Chuan Wang
Yuefeng Ji
author_sort Daquan Yang
collection DOAJ
description A method for the dense integration of one-dimensional (1-D) photonic crystal nanobeam cavity (PCNC) based integrated sensor array (1-D-PCNC-ISA) is proposed. The 1-D-PCNC-ISA consists of multiple parallel-connected sensing channels with airgap separations. On each channel, only a single flexible 1-D-PCNC sensor with large free spectral range (FSR) and high <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula>-factor is contained. With proper engineering of the FSR, multiple ultracompact high-sensitivity 1-D-PCNC sensors can be integrated into microarrays without resonance overlap, and be interrogated simultaneously between a single input/output ports. Using 3-D finite-difference-time-domain (3-D-FDTD) method, the performance of the device is investigated theoretically in the whole paper. With optimization design, a large FSR as wide as 197&#x00A0;nm and high <inline-formula> <tex-math notation="LaTeX">$Q$</tex-math></inline-formula>-factor <inline-formula><tex-math notation="LaTeX">$\sim2 \times 10^5$</tex-math></inline-formula> can be achieved. Moreover, the refractive index sensitivities of a 5-channel 1-D-PCNC-ISA as high as 170.6, 152.7, 138.5, 128.1, and 120.5&#x00A0;nm/RIU are obtained. Particularly, the footprint of a 5-channel 1-D-PCNC-ISA is <inline-formula><tex-math notation="LaTeX">$\sim7\,\mu{\rm m} \times 65\,\mu$</tex-math> </inline-formula>m (width by length), which is decreased by three orders of magnitude compared to the sensor arrays based on 2-D-PC cavity platforms. To the best of our knowledge, this is for the first time that a 1-D-PCNC based multichannel parallel-connected sensor array has been displayed with channel spacing as small as <inline-formula> <tex-math notation="LaTeX">$0.195\,\mu$</tex-math></inline-formula>m, extinction ratio <inline-formula> <tex-math notation="LaTeX">$&#x003E;20$</tex-math></inline-formula>&#x00A0;dB and <inline-formula><tex-math notation="LaTeX"> $Q$</tex-math></inline-formula>-factor <inline-formula><tex-math notation="LaTeX">$&#x003E;10^5$</tex-math></inline-formula> , respectively, without using particular materials or complexities in fabrication. Both the specific result and the general idea are promising in future ultracompact lab-on-a-chip applications and nanophotonic integrations.
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spelling doaj-art-cab0679642d74a158eceeb7ec34781a62025-08-20T03:15:48ZengIEEEIEEE Photonics Journal1943-06552017-01-019411210.1109/JPHOT.2017.27101367938311Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-FactorDaquan Yang0Bo Wang1Xin Chen2Chuan Wang3Yuefeng Ji4State Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing, ChinaState Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing, ChinaState Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing, ChinaState Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing, ChinaState Key Laboratory of Information Photonics and Optical Communications, School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing, ChinaA method for the dense integration of one-dimensional (1-D) photonic crystal nanobeam cavity (PCNC) based integrated sensor array (1-D-PCNC-ISA) is proposed. The 1-D-PCNC-ISA consists of multiple parallel-connected sensing channels with airgap separations. On each channel, only a single flexible 1-D-PCNC sensor with large free spectral range (FSR) and high <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula>-factor is contained. With proper engineering of the FSR, multiple ultracompact high-sensitivity 1-D-PCNC sensors can be integrated into microarrays without resonance overlap, and be interrogated simultaneously between a single input/output ports. Using 3-D finite-difference-time-domain (3-D-FDTD) method, the performance of the device is investigated theoretically in the whole paper. With optimization design, a large FSR as wide as 197&#x00A0;nm and high <inline-formula> <tex-math notation="LaTeX">$Q$</tex-math></inline-formula>-factor <inline-formula><tex-math notation="LaTeX">$\sim2 \times 10^5$</tex-math></inline-formula> can be achieved. Moreover, the refractive index sensitivities of a 5-channel 1-D-PCNC-ISA as high as 170.6, 152.7, 138.5, 128.1, and 120.5&#x00A0;nm/RIU are obtained. Particularly, the footprint of a 5-channel 1-D-PCNC-ISA is <inline-formula><tex-math notation="LaTeX">$\sim7\,\mu{\rm m} \times 65\,\mu$</tex-math> </inline-formula>m (width by length), which is decreased by three orders of magnitude compared to the sensor arrays based on 2-D-PC cavity platforms. To the best of our knowledge, this is for the first time that a 1-D-PCNC based multichannel parallel-connected sensor array has been displayed with channel spacing as small as <inline-formula> <tex-math notation="LaTeX">$0.195\,\mu$</tex-math></inline-formula>m, extinction ratio <inline-formula> <tex-math notation="LaTeX">$&#x003E;20$</tex-math></inline-formula>&#x00A0;dB and <inline-formula><tex-math notation="LaTeX"> $Q$</tex-math></inline-formula>-factor <inline-formula><tex-math notation="LaTeX">$&#x003E;10^5$</tex-math></inline-formula> , respectively, without using particular materials or complexities in fabrication. Both the specific result and the general idea are promising in future ultracompact lab-on-a-chip applications and nanophotonic integrations.https://ieeexplore.ieee.org/document/7938311/Optical interconnectsPhotonic crystalsNanocavitiesSensorsSilicon nanophotonicsIntegrated nanophotonic systems
spellingShingle Daquan Yang
Bo Wang
Xin Chen
Chuan Wang
Yuefeng Ji
Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
IEEE Photonics Journal
Optical interconnects
Photonic crystals
Nanocavities
Sensors
Silicon nanophotonics
Integrated nanophotonic systems
title Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
title_full Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
title_fullStr Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
title_full_unstemmed Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
title_short Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor
title_sort ultracompact on chip multiplexed sensor array based on dense integration of flexible 1 d photonic crystal nanobeam cavity with large free spectral range and high q factor
topic Optical interconnects
Photonic crystals
Nanocavities
Sensors
Silicon nanophotonics
Integrated nanophotonic systems
url https://ieeexplore.ieee.org/document/7938311/
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AT xinchen ultracompactonchipmultiplexedsensorarraybasedondenseintegrationofflexible1dphotoniccrystalnanobeamcavitywithlargefreespectralrangeandhighqfactor
AT chuanwang ultracompactonchipmultiplexedsensorarraybasedondenseintegrationofflexible1dphotoniccrystalnanobeamcavitywithlargefreespectralrangeandhighqfactor
AT yuefengji ultracompactonchipmultiplexedsensorarraybasedondenseintegrationofflexible1dphotoniccrystalnanobeamcavitywithlargefreespectralrangeandhighqfactor