Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production
This paper presents a new methodology for simulation of production processes in order to determine device parametric yield. The elaborated methodology is focused on capturing stochastic relations between every parameter of the subsequent processes that are impossible to determine directly. The curre...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Journal of Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/5561059 |
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