Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production
This paper presents a new methodology for simulation of production processes in order to determine device parametric yield. The elaborated methodology is focused on capturing stochastic relations between every parameter of the subsequent processes that are impossible to determine directly. The curre...
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| Format: | Article |
| Language: | English |
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Wiley
2022-01-01
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| Series: | Journal of Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/5561059 |
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| _version_ | 1849473558803120128 |
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| author | Bartlomiej K. Paszkiewicz Bogdan Paszkiewicz Andrzej Dziedzic |
| author_facet | Bartlomiej K. Paszkiewicz Bogdan Paszkiewicz Andrzej Dziedzic |
| author_sort | Bartlomiej K. Paszkiewicz |
| collection | DOAJ |
| description | This paper presents a new methodology for simulation of production processes in order to determine device parametric yield. The elaborated methodology is focused on capturing stochastic relations between every parameter of the subsequent processes that are impossible to determine directly. The current state-of-the-art together with the gaps in the knowledge regarding yield modelling is presented. A novel approach to the important issue of effective yield modelling that allows the overcoming of current challenges is presented. The methodology’s usefulness is validated with the example of the fabrication process of AlGaN/GaN HEMT (high electron mobility transistor) for application in high-frequency electronics. Fabrication of AlGaN/GaN HEMTs is a complex process due to the large number of technological stages required, most of which are still the subject of ongoing research. Most importantly, the approach presented in this paper could be easily applied to the modelling of any complex production process in every case where it is necessary to examine relations between the final product parameters distribution and the values of the involved process parameters. |
| format | Article |
| id | doaj-art-caaebf7f20cf49b6a528d0e5f8308b72 |
| institution | Kabale University |
| issn | 2314-4912 |
| language | English |
| publishDate | 2022-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Engineering |
| spelling | doaj-art-caaebf7f20cf49b6a528d0e5f8308b722025-08-20T03:24:06ZengWileyJournal of Engineering2314-49122022-01-01202210.1155/2022/5561059Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices ProductionBartlomiej K. Paszkiewicz0Bogdan Paszkiewicz1Andrzej Dziedzic2Wroclaw University of Science and TechnologyWroclaw University of Science and TechnologyWroclaw University of Science and TechnologyThis paper presents a new methodology for simulation of production processes in order to determine device parametric yield. The elaborated methodology is focused on capturing stochastic relations between every parameter of the subsequent processes that are impossible to determine directly. The current state-of-the-art together with the gaps in the knowledge regarding yield modelling is presented. A novel approach to the important issue of effective yield modelling that allows the overcoming of current challenges is presented. The methodology’s usefulness is validated with the example of the fabrication process of AlGaN/GaN HEMT (high electron mobility transistor) for application in high-frequency electronics. Fabrication of AlGaN/GaN HEMTs is a complex process due to the large number of technological stages required, most of which are still the subject of ongoing research. Most importantly, the approach presented in this paper could be easily applied to the modelling of any complex production process in every case where it is necessary to examine relations between the final product parameters distribution and the values of the involved process parameters.http://dx.doi.org/10.1155/2022/5561059 |
| spellingShingle | Bartlomiej K. Paszkiewicz Bogdan Paszkiewicz Andrzej Dziedzic Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production Journal of Engineering |
| title | Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production |
| title_full | Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production |
| title_fullStr | Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production |
| title_full_unstemmed | Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production |
| title_short | Fabrication Process Stochastic Model for Yield Estimation in Microwave Semiconductor Devices Production |
| title_sort | fabrication process stochastic model for yield estimation in microwave semiconductor devices production |
| url | http://dx.doi.org/10.1155/2022/5561059 |
| work_keys_str_mv | AT bartlomiejkpaszkiewicz fabricationprocessstochasticmodelforyieldestimationinmicrowavesemiconductordevicesproduction AT bogdanpaszkiewicz fabricationprocessstochasticmodelforyieldestimationinmicrowavesemiconductordevicesproduction AT andrzejdziedzic fabricationprocessstochasticmodelforyieldestimationinmicrowavesemiconductordevicesproduction |