Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication
In this paper, we propose the application of semiconductor technology processes to fabricate integrated silicon devices that demonstrate the piezoelectric energy harvesting effect. The harvesting structure converts thermal energy into electricity using a piezoelectric transducer, which generates ele...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-11-01
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| Series: | Energies |
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| Online Access: | https://www.mdpi.com/1996-1073/17/23/5896 |
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| author | Andrzej Kubiak Nataliia Bokla Tamara Klymkovych Łukasz Ruta Łukasz Bernacki |
| author_facet | Andrzej Kubiak Nataliia Bokla Tamara Klymkovych Łukasz Ruta Łukasz Bernacki |
| author_sort | Andrzej Kubiak |
| collection | DOAJ |
| description | In this paper, we propose the application of semiconductor technology processes to fabricate integrated silicon devices that demonstrate the piezoelectric energy harvesting effect. The harvesting structure converts thermal energy into electricity using a piezoelectric transducer, which generates electrical signals owing to the dynamic bending under pressure caused by the explosive boiling of the working fluid within the harvester. The challenges of previous works that included complex manufacturing processing and form limitations were addressed by the use of semiconductor technology based on laser beam processing, which led to simplification of the device’s fabrication. The electrical characterization of the fabricated harvester prototype proved its functionality in energy conversion and potential for integration with a step-up converter or power management integrated circuit (PMIC) generating stable impulses ranging from 0.4 to 1.5 V at a frequency of 7 Hz. |
| format | Article |
| id | doaj-art-c7ede04c52ab4aa89d06b490f28a8b32 |
| institution | OA Journals |
| issn | 1996-1073 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Energies |
| spelling | doaj-art-c7ede04c52ab4aa89d06b490f28a8b322025-08-20T01:55:26ZengMDPI AGEnergies1996-10732024-11-011723589610.3390/en17235896Application of Semiconductor Technology for Piezoelectric Energy Harvester FabricationAndrzej Kubiak0Nataliia Bokla1Tamara Klymkovych2Łukasz Ruta3Łukasz Bernacki4Department of Semiconductor and Optoelectronic Devices, Lodz University of Technology, 116 Zeromskiego, 90-924 Lodz, PolandDepartment of Semiconductor and Optoelectronic Devices, Lodz University of Technology, 116 Zeromskiego, 90-924 Lodz, PolandDepartment of Semiconductor and Optoelectronic Devices, Lodz University of Technology, 116 Zeromskiego, 90-924 Lodz, PolandDepartment of Semiconductor and Optoelectronic Devices, Lodz University of Technology, 116 Zeromskiego, 90-924 Lodz, PolandDepartment of Semiconductor and Optoelectronic Devices, Lodz University of Technology, 116 Zeromskiego, 90-924 Lodz, PolandIn this paper, we propose the application of semiconductor technology processes to fabricate integrated silicon devices that demonstrate the piezoelectric energy harvesting effect. The harvesting structure converts thermal energy into electricity using a piezoelectric transducer, which generates electrical signals owing to the dynamic bending under pressure caused by the explosive boiling of the working fluid within the harvester. The challenges of previous works that included complex manufacturing processing and form limitations were addressed by the use of semiconductor technology based on laser beam processing, which led to simplification of the device’s fabrication. The electrical characterization of the fabricated harvester prototype proved its functionality in energy conversion and potential for integration with a step-up converter or power management integrated circuit (PMIC) generating stable impulses ranging from 0.4 to 1.5 V at a frequency of 7 Hz.https://www.mdpi.com/1996-1073/17/23/5896harvesterspiezoelectric energysemiconductor technology |
| spellingShingle | Andrzej Kubiak Nataliia Bokla Tamara Klymkovych Łukasz Ruta Łukasz Bernacki Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication Energies harvesters piezoelectric energy semiconductor technology |
| title | Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication |
| title_full | Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication |
| title_fullStr | Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication |
| title_full_unstemmed | Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication |
| title_short | Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication |
| title_sort | application of semiconductor technology for piezoelectric energy harvester fabrication |
| topic | harvesters piezoelectric energy semiconductor technology |
| url | https://www.mdpi.com/1996-1073/17/23/5896 |
| work_keys_str_mv | AT andrzejkubiak applicationofsemiconductortechnologyforpiezoelectricenergyharvesterfabrication AT nataliiabokla applicationofsemiconductortechnologyforpiezoelectricenergyharvesterfabrication AT tamaraklymkovych applicationofsemiconductortechnologyforpiezoelectricenergyharvesterfabrication AT łukaszruta applicationofsemiconductortechnologyforpiezoelectricenergyharvesterfabrication AT łukaszbernacki applicationofsemiconductortechnologyforpiezoelectricenergyharvesterfabrication |