Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing
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| Format: | Article |
| Language: | English |
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EDP Sciences
2024-01-01
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| Series: | BIO Web of Conferences |
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| Online Access: | https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24040.pdf |
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| author | Park Jucheol Park Yeong Gyeong Kang Min-Ho Lee Myung-Keun Hyun Moon Seop |
| author_facet | Park Jucheol Park Yeong Gyeong Kang Min-Ho Lee Myung-Keun Hyun Moon Seop |
| author_sort | Park Jucheol |
| collection | DOAJ |
| format | Article |
| id | doaj-art-c7644b0b14c945d99b98fa179440f4a1 |
| institution | OA Journals |
| issn | 2117-4458 |
| language | English |
| publishDate | 2024-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | BIO Web of Conferences |
| spelling | doaj-art-c7644b0b14c945d99b98fa179440f4a12025-08-20T02:10:41ZengEDP SciencesBIO Web of Conferences2117-44582024-01-011292404010.1051/bioconf/202412924040bioconf_emc2024_24040Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal AnnealingPark Jucheol0Park Yeong Gyeong1Kang Min-Ho2Lee Myung-Keun3Hyun Moon Seop4Gumi Electronics & Information Technology Research Institute (GERI)Gumi Electronics & Information Technology Research Institute (GERI)Department of Nano-process, National NanoFab Center (NNFC)Department of Nano-process, National NanoFab Center (NNFC)Department of Nano-process, National NanoFab Center (NNFC)https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24040.pdfhf0.5zr0.5o2ferroelectricityhr-stemefm |
| spellingShingle | Park Jucheol Park Yeong Gyeong Kang Min-Ho Lee Myung-Keun Hyun Moon Seop Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing BIO Web of Conferences hf0.5zr0.5o2 ferroelectricity hr-stem efm |
| title | Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing |
| title_full | Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing |
| title_fullStr | Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing |
| title_full_unstemmed | Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing |
| title_short | Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing |
| title_sort | structural and electrical characterization of hf0 5zr0 5o2 thin films crystallized by rapid thermal annealing |
| topic | hf0.5zr0.5o2 ferroelectricity hr-stem efm |
| url | https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24040.pdf |
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