Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2025-02-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.4c10935 |
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| _version_ | 1850233075548553216 |
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| author | Chang Eon Kim Jae Won Shim Seok Jun Ham Seung Hyun Kim |
| author_facet | Chang Eon Kim Jae Won Shim Seok Jun Ham Seung Hyun Kim |
| author_sort | Chang Eon Kim |
| collection | DOAJ |
| format | Article |
| id | doaj-art-c615e317ff064c6480972ff7898eb2e2 |
| institution | OA Journals |
| issn | 2470-1343 |
| language | English |
| publishDate | 2025-02-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-c615e317ff064c6480972ff7898eb2e22025-08-20T02:03:00ZengAmerican Chemical SocietyACS Omega2470-13432025-02-011088579858710.1021/acsomega.4c10935Utilizing Block Copolymer Films as an Etch Mask for Pattern TransferChang Eon KimJae Won ShimSeok Jun HamSeung Hyun Kimhttps://doi.org/10.1021/acsomega.4c10935 |
| spellingShingle | Chang Eon Kim Jae Won Shim Seok Jun Ham Seung Hyun Kim Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer ACS Omega |
| title | Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer |
| title_full | Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer |
| title_fullStr | Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer |
| title_full_unstemmed | Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer |
| title_short | Utilizing Block Copolymer Films as an Etch Mask for Pattern Transfer |
| title_sort | utilizing block copolymer films as an etch mask for pattern transfer |
| url | https://doi.org/10.1021/acsomega.4c10935 |
| work_keys_str_mv | AT changeonkim utilizingblockcopolymerfilmsasanetchmaskforpatterntransfer AT jaewonshim utilizingblockcopolymerfilmsasanetchmaskforpatterntransfer AT seokjunham utilizingblockcopolymerfilmsasanetchmaskforpatterntransfer AT seunghyunkim utilizingblockcopolymerfilmsasanetchmaskforpatterntransfer |