Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators

Piezoelectric nanogenerators (PNGs) based on ZnO nanowires embedded in a polymer matrix have shown great promise in converting ambient mechanical energy into electrical energy, positioning them as candidates for autonomous sensor applications. Here, we fabricate vertically integrated ZnO NW/parylene...

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Main Authors: Manuel Manrique, Vincent Consonni, Gustavo Ardila, Aymen Ghouma, Gwenaël Le Rhun, Bassem Salem
Format: Article
Language:English
Published: Elsevier 2025-03-01
Series:Nano Trends
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Online Access:http://www.sciencedirect.com/science/article/pii/S2666978124000369
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author Manuel Manrique
Vincent Consonni
Gustavo Ardila
Aymen Ghouma
Gwenaël Le Rhun
Bassem Salem
author_facet Manuel Manrique
Vincent Consonni
Gustavo Ardila
Aymen Ghouma
Gwenaël Le Rhun
Bassem Salem
author_sort Manuel Manrique
collection DOAJ
description Piezoelectric nanogenerators (PNGs) based on ZnO nanowires embedded in a polymer matrix have shown great promise in converting ambient mechanical energy into electrical energy, positioning them as candidates for autonomous sensor applications. Here, we fabricate vertically integrated ZnO NW/parylene-C composite-based PNGs using a capacitive configuration. By carefully controlling the thickness of the parylene-C top layer over ZnO nanowire arrays, four PNGs with parylene-C top layer thicknesses ranging from 1.1 to 3.2 µm were successfully fabricated. Raman spectroscopy suggests that the parylene-C does not affect the crystallographic properties of ZnO nanowires when coated. In addition, electrical impedance measurements reveal that increasing the parylene-C top layer thickness decreases the PNG capacitance, leading to higher internal impedance. The performance of these PNGs is assessed through piezoelectric characterizations across a range of load resistances, from 50 kΩ to 122 MΩ, under vertical compression forces of 1 N applied at 0.2 Hz. These tests have identified an optimal parylene-C top layer thickness of around 2 µm, resulting in an instantaneous power density of 1.8 µW/cm3 generated by the PNG. These findings highlight promising pathways for enhancing the efficiency and performance of PNGs.
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spelling doaj-art-c435f433715e4c65923b8f3fa767ff192025-08-20T03:42:39ZengElsevierNano Trends2666-97812025-03-01910006610.1016/j.nwnano.2024.100066Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogeneratorsManuel Manrique0Vincent Consonni1Gustavo Ardila2Aymen Ghouma3Gwenaël Le Rhun4Bassem Salem5Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, F-38054, Grenoble, France; Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000, Grenoble, France; Univ. Grenoble Alpes, CEA, LETI, F-38000, Grenoble, FranceUniv. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000, Grenoble, France; Corresponding author.Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, CROMA, F-38000, Grenoble, FranceUniv. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, F-38054, Grenoble, FranceUniv. Grenoble Alpes, CEA, LETI, F-38000, Grenoble, FranceUniv. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, F-38054, Grenoble, France; Corresponding author.Piezoelectric nanogenerators (PNGs) based on ZnO nanowires embedded in a polymer matrix have shown great promise in converting ambient mechanical energy into electrical energy, positioning them as candidates for autonomous sensor applications. Here, we fabricate vertically integrated ZnO NW/parylene-C composite-based PNGs using a capacitive configuration. By carefully controlling the thickness of the parylene-C top layer over ZnO nanowire arrays, four PNGs with parylene-C top layer thicknesses ranging from 1.1 to 3.2 µm were successfully fabricated. Raman spectroscopy suggests that the parylene-C does not affect the crystallographic properties of ZnO nanowires when coated. In addition, electrical impedance measurements reveal that increasing the parylene-C top layer thickness decreases the PNG capacitance, leading to higher internal impedance. The performance of these PNGs is assessed through piezoelectric characterizations across a range of load resistances, from 50 kΩ to 122 MΩ, under vertical compression forces of 1 N applied at 0.2 Hz. These tests have identified an optimal parylene-C top layer thickness of around 2 µm, resulting in an instantaneous power density of 1.8 µW/cm3 generated by the PNG. These findings highlight promising pathways for enhancing the efficiency and performance of PNGs.http://www.sciencedirect.com/science/article/pii/S2666978124000369Piezoelectric nanogeneratorsZnO nanowiresChemical bath depositionParylene-C
spellingShingle Manuel Manrique
Vincent Consonni
Gustavo Ardila
Aymen Ghouma
Gwenaël Le Rhun
Bassem Salem
Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
Nano Trends
Piezoelectric nanogenerators
ZnO nanowires
Chemical bath deposition
Parylene-C
title Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
title_full Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
title_fullStr Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
title_full_unstemmed Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
title_short Performance optimization of ZnO nanowire/parylene-C composite-based piezoelectric nanogenerators
title_sort performance optimization of zno nanowire parylene c composite based piezoelectric nanogenerators
topic Piezoelectric nanogenerators
ZnO nanowires
Chemical bath deposition
Parylene-C
url http://www.sciencedirect.com/science/article/pii/S2666978124000369
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