A Capacitive Liquid-Phase Sensor and Its Sensing Mechanism Using Nanoporous Anodic Aluminum Oxide
With the evolution of micro/nanotechnology, anodic aluminum oxide (AAO) has received attention for sensor applications due to its regular and high-aspect-ratio nanopore structure with an excellent sensing performance, especially for electrical and optical sensors. Here, we propose the application of...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Nanomanufacturing |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-687X/5/2/8 |
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| Summary: | With the evolution of micro/nanotechnology, anodic aluminum oxide (AAO) has received attention for sensor applications due to its regular and high-aspect-ratio nanopore structure with an excellent sensing performance, especially for electrical and optical sensors. Here, we propose the application of these capacitance and porous properties in a facile nanoporous AAO liquid sensor and study an efficient and economical method for preparing AAO substrates for liquid-phase substance sensing. By applying hybrid pulse anodization (HPA), a growth rate of approximately 5.9 μm/h was achieved in AAO fabrication. Compared to traditional low-temperature (0–10 °C) and two-step anodization with a growth rate of 1–3 μm/h, this process is significantly improved. The effect of pore widening on the performance of electrical sensors is also investigated and discussed. After pore widening, the capacitance values of AAO for air as a reference and various liquids, namely deionized water, alcohol, and acetone, are measured as 3.8 nF, 295.3 nF, 243.5 nF, and 210.1 nF, respectively. These results align with the trend in the dielectric constants and demonstrate the ability to clearly distinguish between different substances. The mechanism of AAO capacitive liquid-phase sensors can mainly be explained from two perspectives. First, since an AAO capacitive sensor is a parallel capacitor structure, the dielectric constant of the substance directly influences the capacitance value. In addition, pore widening increases the proportion of liquid filling the structure, enabling the sensor to clearly differentiate between substances. The other is the affinity between the substance and the AAO sensor, which can be determined using a contact angle test. The contact angles are measured as values of 93.2° and 67.7° before and after pore widening, respectively. The better the substance can fully fill the pores, the higher the capacitance value it yields. |
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| ISSN: | 2673-687X |