Laser Enhanced Hydrogen Passivation of Silicon Wafers

Laser Enhanced Hydrogen Passivation of Silicon Wafers

The application of lasers to enable advanced hydrogenation processes with charge state control is explored. Localised hydrogenation is realised through the use of lasers to achieve localised illumination and heating of the silicon material and hence spatially control the hydrogenation process. Impr...

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Bibliographic Details
Main Authors:	Lihui Song, Alison Wenham, Sisi Wang, Phillip Hamer, Mohammad Shakil Ahmmed, Brett Hallam, Ly Mai, Malcolm Abbott, Evatt R. Hawkes, CheeMun Chong, Stuart Wenham
Format:	Article
Language:	English
Published:	Wiley 2015-01-01
Series:	International Journal of Photoenergy
Online Access:	http://dx.doi.org/10.1155/2015/193892
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