Unraveling Mass Transfer and Reaction Processes in CVD-Grown MoS<sub>2</sub> Films: A Multiphysical Field Coupling Study

Unraveling Mass Transfer and Reaction Processes in CVD-Grown MoS<sub>2</sub> Films: A Multiphysical Field Coupling Study

The two-dimensional semiconductor material MoS<sub>2</sub>, grown via chemical vapor deposition, has shown significant potential to surpass silicon in advanced electronic technologies. However, the mass transfer and chemical reaction processes critical to the nucleation and growth of MoS...

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Bibliographic Details
Main Authors:	Zhen Yang, Jinwei Lin, Qing Zhang, Yutian Liu, Shujun Han, Yanbin Zhou, Shuo Chen, Shenlong Zhong, Xianli Su, Qingjie Zhang, Xinfeng Tang
Format:	Article
Language:	English
Published:	MDPI AG 2025-02-01
Series:	Applied Sciences
Subjects:	MoS<sub>2</sub> CVD finite-element modeling mass transfer
Online Access:	https://www.mdpi.com/2076-3417/15/5/2627
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