Stealth dicing strategy for fabricating the cleavage mirror facets of semiconductor laser

Stealth dicing strategy for fabricating the cleavage mirror facets of semiconductor laser

We investigated the formation of cavity mirror facets of GaN-based laser diodes (LDs) using laser stealth dicing (SD) approach in skip-and-scribing mode and compared it with traditional diamond-tip edge-scribing method. As a result, high-quality LD cavity mirrors and non-degradative lasing propertie...

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Bibliographic Details
Main Authors: Menglai Lei, Linghai Meng, Yucheng Lin, Yujing Deng, Huanqing Chen, Lei Liu, Jianbo Fu, Shengxiang Jiang, Hua Zong, Xiaodong Hu
Format: Article
Language:English
Published: Elsevier 2025-03-01
Series:Materials & Design
Subjects:
Cavity mirror facets
Cleavage
GaN laser diode
Laser stealth dicing
Deflection loss
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127525001157
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