All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution

All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution

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Bibliographic Details
Main Authors:	Hanlin Du, Hongyan Xia, Yun Tang, Ke Cao, Jiajun Ma, Junxiao Yang
Format:	Article
Language:	English
Published:	American Chemical Society 2025-04-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.4c10940
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