All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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American Chemical Society
2025-04-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.4c10940 |
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| _version_ | 1850178637541670912 |
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| author | Hanlin Du Hongyan Xia Yun Tang Ke Cao Jiajun Ma Junxiao Yang |
| author_facet | Hanlin Du Hongyan Xia Yun Tang Ke Cao Jiajun Ma Junxiao Yang |
| author_sort | Hanlin Du |
| collection | DOAJ |
| format | Article |
| id | doaj-art-bd0cb45beed24901846f9de389e62c2b |
| institution | OA Journals |
| issn | 2470-1343 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-bd0cb45beed24901846f9de389e62c2b2025-08-20T02:18:42ZengAmerican Chemical SocietyACS Omega2470-13432025-04-011015152191522810.1021/acsomega.4c10940All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern ResolutionHanlin Du0Hongyan Xia1Yun Tang2Ke Cao3Jiajun Ma4Junxiao Yang5School of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang, ChinaDepartment of Applied Sciences, Northumbria University, Newcastle Upon Tyne, U.K.School of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang, ChinaSchool of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang, ChinaSchool of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang, ChinaSchool of Materials and Chemistry and State Key Laboratory of Environmentally-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang, Chinahttps://doi.org/10.1021/acsomega.4c10940 |
| spellingShingle | Hanlin Du Hongyan Xia Yun Tang Ke Cao Jiajun Ma Junxiao Yang All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution ACS Omega |
| title | All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution |
| title_full | All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution |
| title_fullStr | All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution |
| title_full_unstemmed | All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution |
| title_short | All-Hydrocarbon Low-Dielectric Loss Benzocyclobutene-Encapsulated Photoresist with High Pattern Resolution |
| title_sort | all hydrocarbon low dielectric loss benzocyclobutene encapsulated photoresist with high pattern resolution |
| url | https://doi.org/10.1021/acsomega.4c10940 |
| work_keys_str_mv | AT hanlindu allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution AT hongyanxia allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution AT yuntang allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution AT kecao allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution AT jiajunma allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution AT junxiaoyang allhydrocarbonlowdielectriclossbenzocyclobuteneencapsulatedphotoresistwithhighpatternresolution |