Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching

Mechanical cracks induced during grinding of brittle materials known as subsurface damage (SSD) reduce mechanical and optical properties of optical components. A characterisation of SSD is needed to guarantee a good quality and to optimize individual processes and processing chains. Current research...

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Main Authors: Frank Samson, Zhang Wei, Thelemann Dennis, Elies Oliver, Arnold Thomas, Bliedtner Jens
Format: Article
Language:English
Published: EDP Sciences 2024-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2024/19/epjconf_eosam2024_03010.pdf
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author Frank Samson
Zhang Wei
Thelemann Dennis
Elies Oliver
Arnold Thomas
Bliedtner Jens
author_facet Frank Samson
Zhang Wei
Thelemann Dennis
Elies Oliver
Arnold Thomas
Bliedtner Jens
author_sort Frank Samson
collection DOAJ
description Mechanical cracks induced during grinding of brittle materials known as subsurface damage (SSD) reduce mechanical and optical properties of optical components. A characterisation of SSD is needed to guarantee a good quality and to optimize individual processes and processing chains. Current research focuses on non-destructive methods such as optical coherence tomography (OCT) to evaluate SSD depth and distribution and to replace currently established, but time-consuming and labour-intensive destructive methods. Yet the imaging of SSD remains challenging, even with high-resolution OCT providing a high sensitivity. The presented work proposes a combined measurement approach of enhanced SSD imaging by using a potassium hydroxide (KOH) wet etching process prior to OCT measurement. An etching process using 30% KOH at 80°C is applied and resulting etching rates are analysed. It is shown by an iterative etching experiment on optical glass SF6 that the KOH etching process enhances OCT signals of SSD under the surface, revealing up to 2.4-times deeper maximum SSD depths using an identical measurement setup.
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institution OA Journals
issn 2100-014X
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publishDate 2024-01-01
publisher EDP Sciences
record_format Article
series EPJ Web of Conferences
spelling doaj-art-bc66381dad6244ca85d7398802a081fc2025-08-20T02:12:55ZengEDP SciencesEPJ Web of Conferences2100-014X2024-01-013090301010.1051/epjconf/202430903010epjconf_eosam2024_03010Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etchingFrank Samson0Zhang Wei1Thelemann Dennis2Elies Oliver3Arnold Thomas4Bliedtner Jens5Ernst-Abbe-Hochschule Jena University of Applied Sciences, Faculty of SciTecErnst-Abbe-Hochschule Jena University of Applied Sciences, Faculty of SciTecErnst-Abbe-Hochschule Jena University of Applied Sciences, Faculty of SciTecErnst-Abbe-Hochschule Jena University of Applied Sciences, Faculty of SciTecLeibniz Institute of Surface Engineering (IOM)Ernst-Abbe-Hochschule Jena University of Applied Sciences, Faculty of SciTecMechanical cracks induced during grinding of brittle materials known as subsurface damage (SSD) reduce mechanical and optical properties of optical components. A characterisation of SSD is needed to guarantee a good quality and to optimize individual processes and processing chains. Current research focuses on non-destructive methods such as optical coherence tomography (OCT) to evaluate SSD depth and distribution and to replace currently established, but time-consuming and labour-intensive destructive methods. Yet the imaging of SSD remains challenging, even with high-resolution OCT providing a high sensitivity. The presented work proposes a combined measurement approach of enhanced SSD imaging by using a potassium hydroxide (KOH) wet etching process prior to OCT measurement. An etching process using 30% KOH at 80°C is applied and resulting etching rates are analysed. It is shown by an iterative etching experiment on optical glass SF6 that the KOH etching process enhances OCT signals of SSD under the surface, revealing up to 2.4-times deeper maximum SSD depths using an identical measurement setup.https://www.epj-conferences.org/articles/epjconf/pdf/2024/19/epjconf_eosam2024_03010.pdf
spellingShingle Frank Samson
Zhang Wei
Thelemann Dennis
Elies Oliver
Arnold Thomas
Bliedtner Jens
Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
EPJ Web of Conferences
title Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
title_full Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
title_fullStr Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
title_full_unstemmed Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
title_short Enhanced imaging of Subsurface Damage in optical glass SF6 with Optical Coherence Tomography using KOH wet etching
title_sort enhanced imaging of subsurface damage in optical glass sf6 with optical coherence tomography using koh wet etching
url https://www.epj-conferences.org/articles/epjconf/pdf/2024/19/epjconf_eosam2024_03010.pdf
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