Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
This study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation syste...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/14/22/1852 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1850267005171531776 |
|---|---|
| author | Tsung-Shine Ko Hsiang-Yu Hsieh Chi Lee Szu-Hung Chen Wei-Chun Chen Wei-Lin Wang Yang-Wei Lin Sean Wu |
| author_facet | Tsung-Shine Ko Hsiang-Yu Hsieh Chi Lee Szu-Hung Chen Wei-Chun Chen Wei-Lin Wang Yang-Wei Lin Sean Wu |
| author_sort | Tsung-Shine Ko |
| collection | DOAJ |
| description | This study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation system, followed by two-stage sulfurization in a high-temperature furnace to grow MoS<sub>2</sub> thin films consisting of only a few atomic layers. During the dropwise titration of Rhodamine 6G (R6G) solution, a longitudinal electric field was applied using a Keithley 2400 (Cleveland, OH, USA) source meter. Raman mapping revealed that under a 100 mV condition, the analyte R6G molecules were effectively confined within the pits. Due to its two-dimensional structure, MoS<sub>2</sub> provides a high surface area and supports a surface-enhanced Raman scattering (SERS) charge transfer mechanism. The SERS results demonstrated that the intensity in the pits of the few-layer MoS<sub>2</sub>/patterned Si SERS substrate was approximately 274 times greater compared to planar Si, with a limit of detection reaching 10<sup>−5</sup> M. The experimental results confirm that this method effectively resolves the issue of random distribution of analyte molecules during droplet evaporation, thereby enhancing detection sensitivity and stability. |
| format | Article |
| id | doaj-art-bc5ed7082ce4440b83ecb2fddd4ee7a7 |
| institution | OA Journals |
| issn | 2079-4991 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj-art-bc5ed7082ce4440b83ecb2fddd4ee7a72025-08-20T01:53:57ZengMDPI AGNanomaterials2079-49912024-11-011422185210.3390/nano14221852Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid PitsTsung-Shine Ko0Hsiang-Yu Hsieh1Chi Lee2Szu-Hung Chen3Wei-Chun Chen4Wei-Lin Wang5Yang-Wei Lin6Sean Wu7Department of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanDepartment of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanDepartment of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanTaiwan Semiconductor Research Institute, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300091, TaiwanNational Applied Research Laboratories, Taiwan Instrument Research Institute, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300092, TaiwanNational Applied Research Laboratories, Taiwan Instrument Research Institute, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300092, TaiwanDepartment of Chemistry, National Changhua University of Education, No. 1, Jinde Road, Changhua 50074, TaiwanDepartment of Semiconductor Engineering, Lunghwa University of Science and Technology, No. 300, Sec. 1, Wanshou Rd., Guishan District, Taoyuan City 333326, TaiwanThis study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation system, followed by two-stage sulfurization in a high-temperature furnace to grow MoS<sub>2</sub> thin films consisting of only a few atomic layers. During the dropwise titration of Rhodamine 6G (R6G) solution, a longitudinal electric field was applied using a Keithley 2400 (Cleveland, OH, USA) source meter. Raman mapping revealed that under a 100 mV condition, the analyte R6G molecules were effectively confined within the pits. Due to its two-dimensional structure, MoS<sub>2</sub> provides a high surface area and supports a surface-enhanced Raman scattering (SERS) charge transfer mechanism. The SERS results demonstrated that the intensity in the pits of the few-layer MoS<sub>2</sub>/patterned Si SERS substrate was approximately 274 times greater compared to planar Si, with a limit of detection reaching 10<sup>−5</sup> M. The experimental results confirm that this method effectively resolves the issue of random distribution of analyte molecules during droplet evaporation, thereby enhancing detection sensitivity and stability.https://www.mdpi.com/2079-4991/14/22/1852SERSMoS<sub>2</sub>electrodemolecular aggregation |
| spellingShingle | Tsung-Shine Ko Hsiang-Yu Hsieh Chi Lee Szu-Hung Chen Wei-Chun Chen Wei-Lin Wang Yang-Wei Lin Sean Wu Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits Nanomaterials SERS MoS<sub>2</sub> electrode molecular aggregation |
| title | Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits |
| title_full | Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits |
| title_fullStr | Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits |
| title_full_unstemmed | Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits |
| title_short | Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits |
| title_sort | electric field enhanced sers detection using mos sub 2 sub coated patterned si substrate with micro pyramid pits |
| topic | SERS MoS<sub>2</sub> electrode molecular aggregation |
| url | https://www.mdpi.com/2079-4991/14/22/1852 |
| work_keys_str_mv | AT tsungshineko electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT hsiangyuhsieh electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT chilee electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT szuhungchen electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT weichunchen electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT weilinwang electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT yangweilin electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits AT seanwu electricfieldenhancedsersdetectionusingmossub2subcoatedpatternedsisubstratewithmicropyramidpits |