Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits

This study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation syste...

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Main Authors: Tsung-Shine Ko, Hsiang-Yu Hsieh, Chi Lee, Szu-Hung Chen, Wei-Chun Chen, Wei-Lin Wang, Yang-Wei Lin, Sean Wu
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Nanomaterials
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Online Access:https://www.mdpi.com/2079-4991/14/22/1852
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author Tsung-Shine Ko
Hsiang-Yu Hsieh
Chi Lee
Szu-Hung Chen
Wei-Chun Chen
Wei-Lin Wang
Yang-Wei Lin
Sean Wu
author_facet Tsung-Shine Ko
Hsiang-Yu Hsieh
Chi Lee
Szu-Hung Chen
Wei-Chun Chen
Wei-Lin Wang
Yang-Wei Lin
Sean Wu
author_sort Tsung-Shine Ko
collection DOAJ
description This study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation system, followed by two-stage sulfurization in a high-temperature furnace to grow MoS<sub>2</sub> thin films consisting of only a few atomic layers. During the dropwise titration of Rhodamine 6G (R6G) solution, a longitudinal electric field was applied using a Keithley 2400 (Cleveland, OH, USA) source meter. Raman mapping revealed that under a 100 mV condition, the analyte R6G molecules were effectively confined within the pits. Due to its two-dimensional structure, MoS<sub>2</sub> provides a high surface area and supports a surface-enhanced Raman scattering (SERS) charge transfer mechanism. The SERS results demonstrated that the intensity in the pits of the few-layer MoS<sub>2</sub>/patterned Si SERS substrate was approximately 274 times greater compared to planar Si, with a limit of detection reaching 10<sup>−5</sup> M. The experimental results confirm that this method effectively resolves the issue of random distribution of analyte molecules during droplet evaporation, thereby enhancing detection sensitivity and stability.
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spelling doaj-art-bc5ed7082ce4440b83ecb2fddd4ee7a72025-08-20T01:53:57ZengMDPI AGNanomaterials2079-49912024-11-011422185210.3390/nano14221852Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid PitsTsung-Shine Ko0Hsiang-Yu Hsieh1Chi Lee2Szu-Hung Chen3Wei-Chun Chen4Wei-Lin Wang5Yang-Wei Lin6Sean Wu7Department of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanDepartment of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanDepartment of Electronic Engineering, National Changhua University of Education, No. 2, Shi-Da Road, Changhua 50074, TaiwanTaiwan Semiconductor Research Institute, No. 26, Prosperity Road 1, Hsinchu Science Park, Hsinchu 300091, TaiwanNational Applied Research Laboratories, Taiwan Instrument Research Institute, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300092, TaiwanNational Applied Research Laboratories, Taiwan Instrument Research Institute, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300092, TaiwanDepartment of Chemistry, National Changhua University of Education, No. 1, Jinde Road, Changhua 50074, TaiwanDepartment of Semiconductor Engineering, Lunghwa University of Science and Technology, No. 300, Sec. 1, Wanshou Rd., Guishan District, Taoyuan City 333326, TaiwanThis study utilized semiconductor processing techniques to fabricate patterned silicon (Si) substrates with arrays of inverted pyramid-shaped micro-pits by etching. Molybdenum trioxide (MoO<sub>3</sub>) was then deposited on these patterned Si substrates using a thermal evaporation system, followed by two-stage sulfurization in a high-temperature furnace to grow MoS<sub>2</sub> thin films consisting of only a few atomic layers. During the dropwise titration of Rhodamine 6G (R6G) solution, a longitudinal electric field was applied using a Keithley 2400 (Cleveland, OH, USA) source meter. Raman mapping revealed that under a 100 mV condition, the analyte R6G molecules were effectively confined within the pits. Due to its two-dimensional structure, MoS<sub>2</sub> provides a high surface area and supports a surface-enhanced Raman scattering (SERS) charge transfer mechanism. The SERS results demonstrated that the intensity in the pits of the few-layer MoS<sub>2</sub>/patterned Si SERS substrate was approximately 274 times greater compared to planar Si, with a limit of detection reaching 10<sup>−5</sup> M. The experimental results confirm that this method effectively resolves the issue of random distribution of analyte molecules during droplet evaporation, thereby enhancing detection sensitivity and stability.https://www.mdpi.com/2079-4991/14/22/1852SERSMoS<sub>2</sub>electrodemolecular aggregation
spellingShingle Tsung-Shine Ko
Hsiang-Yu Hsieh
Chi Lee
Szu-Hung Chen
Wei-Chun Chen
Wei-Lin Wang
Yang-Wei Lin
Sean Wu
Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
Nanomaterials
SERS
MoS<sub>2</sub>
electrode
molecular aggregation
title Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
title_full Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
title_fullStr Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
title_full_unstemmed Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
title_short Electric Field-Enhanced SERS Detection Using MoS<sub>2</sub>-Coated Patterned Si Substrate with Micro-Pyramid Pits
title_sort electric field enhanced sers detection using mos sub 2 sub coated patterned si substrate with micro pyramid pits
topic SERS
MoS<sub>2</sub>
electrode
molecular aggregation
url https://www.mdpi.com/2079-4991/14/22/1852
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