Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition
In this study, aluminum nitrid (AlN) thin films were deposited on steel using reactive sputtering physical vapour deposition (PVD). The aim was to develop an AlN-coated steel surface and assess its tribological and mechanical behavior. X-ray diffraction results confirmed the formation of the AlN thi...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2025-01-01
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| Series: | Materials Research Express |
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| Online Access: | https://doi.org/10.1088/2053-1591/adec43 |
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| author | Amit Bhargav Abhishek Bhaisare Sasikumar C Mangesh Lodhe |
| author_facet | Amit Bhargav Abhishek Bhaisare Sasikumar C Mangesh Lodhe |
| author_sort | Amit Bhargav |
| collection | DOAJ |
| description | In this study, aluminum nitrid (AlN) thin films were deposited on steel using reactive sputtering physical vapour deposition (PVD). The aim was to develop an AlN-coated steel surface and assess its tribological and mechanical behavior. X-ray diffraction results confirmed the formation of the AlN thin film, which had a thickness ranging from 0.5 to 1.1 μm, as measured by scanning electron microscopy. The morphology of the AlN film exhibited a nano-crystalline structure. The roughness of the thin film was measured at 96.377 nm, while the grain size ranged from 0.073 to 0.213 μm, as determined by atomic force microscopy (AFM). Additionally, the thin film displayed excellent resistance to wear and improved surface hardness. |
| format | Article |
| id | doaj-art-bbf9aba22ae34009a5e2fc451102863e |
| institution | Kabale University |
| issn | 2053-1591 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj-art-bbf9aba22ae34009a5e2fc451102863e2025-08-20T03:50:58ZengIOP PublishingMaterials Research Express2053-15912025-01-0112707640110.1088/2053-1591/adec43Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering depositionAmit Bhargav0https://orcid.org/0009-0009-8702-1894Abhishek Bhaisare1Sasikumar C2https://orcid.org/0000-0003-0949-0176Mangesh Lodhe3Materials and Metallurgical Engineering Department, Maulana Azad National Institute of Technology , Bhopal 462003, IndiaMaterials and Metallurgical Engineering Department, Maulana Azad National Institute of Technology , Bhopal 462003, IndiaMaterials and Metallurgical Engineering Department, Maulana Azad National Institute of Technology , Bhopal 462003, IndiaMaterials and Metallurgical Engineering Department, Maulana Azad National Institute of Technology , Bhopal 462003, IndiaIn this study, aluminum nitrid (AlN) thin films were deposited on steel using reactive sputtering physical vapour deposition (PVD). The aim was to develop an AlN-coated steel surface and assess its tribological and mechanical behavior. X-ray diffraction results confirmed the formation of the AlN thin film, which had a thickness ranging from 0.5 to 1.1 μm, as measured by scanning electron microscopy. The morphology of the AlN film exhibited a nano-crystalline structure. The roughness of the thin film was measured at 96.377 nm, while the grain size ranged from 0.073 to 0.213 μm, as determined by atomic force microscopy (AFM). Additionally, the thin film displayed excellent resistance to wear and improved surface hardness.https://doi.org/10.1088/2053-1591/adec43thin filmaluminum nitride (AlN)reactive sputtering physical vapour deposition (PVD) |
| spellingShingle | Amit Bhargav Abhishek Bhaisare Sasikumar C Mangesh Lodhe Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition Materials Research Express thin film aluminum nitride (AlN) reactive sputtering physical vapour deposition (PVD) |
| title | Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition |
| title_full | Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition |
| title_fullStr | Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition |
| title_full_unstemmed | Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition |
| title_short | Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition |
| title_sort | growth and characterization of aluminum nitride aln thin film on steel using reactive sputtering deposition |
| topic | thin film aluminum nitride (AlN) reactive sputtering physical vapour deposition (PVD) |
| url | https://doi.org/10.1088/2053-1591/adec43 |
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