Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells

1.5 wt% zinc fluoride (ZnF2) was mixed with zinc oxide powder to form the F-doped ZnO (FZO) composition. At first, the FZO thin films were deposited at room temperature and 5×10-3 Torr in pure Ar under different deposition power. Hall measurements of the as-deposited FZO thin films were investigated...

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Main Authors: Fang-Hsing Wang, Shang-Chao Hung, Cheng-Fu Yang, Yen-Hsien Lee
Format: Article
Language:English
Published: Wiley 2014-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2014/425057
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author Fang-Hsing Wang
Shang-Chao Hung
Cheng-Fu Yang
Yen-Hsien Lee
author_facet Fang-Hsing Wang
Shang-Chao Hung
Cheng-Fu Yang
Yen-Hsien Lee
author_sort Fang-Hsing Wang
collection DOAJ
description 1.5 wt% zinc fluoride (ZnF2) was mixed with zinc oxide powder to form the F-doped ZnO (FZO) composition. At first, the FZO thin films were deposited at room temperature and 5×10-3 Torr in pure Ar under different deposition power. Hall measurements of the as-deposited FZO thin films were investigated, and then the electrical properties were used to find the deposition power causing the FZO thin films with minimum resistance. The FZO thin films with minimum resistance were further treated by H2 plasma and then found their variations in the electrical properties by Hall measurements. Hydrochloric (HCl) acid solutions with different concentrations (0.1%, 0.2%, and 0.5%) were used to etch the surfaces of the FZO thin films. Finally, the as-deposited, HCl-etched as-deposited, and HCl-etched H2-plasma-treated FZO thin films were used as transparent electrodes to fabricate the p-i-n α-Si:H thin film solar cells and their characteristics were compared in this study. We would show that using H2-plasma-treated and HCl-etched FZO thin films as transparent electrodes would improve the efficiency of the fabricated thin film solar cells.
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series International Journal of Photoenergy
spelling doaj-art-bb9585c7d7e048e38d8b14a80628b9af2025-08-20T03:22:54ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/425057425057Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar CellsFang-Hsing Wang0Shang-Chao Hung1Cheng-Fu Yang2Yen-Hsien Lee3Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 40227, TaiwanDepartment of Electrical Information Technology and Communications, Shih Chien University, Kaohsiung Campus, Kaohsiung 84550, TaiwanDepartment of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung 81147, TaiwanDepartment of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 40227, Taiwan1.5 wt% zinc fluoride (ZnF2) was mixed with zinc oxide powder to form the F-doped ZnO (FZO) composition. At first, the FZO thin films were deposited at room temperature and 5×10-3 Torr in pure Ar under different deposition power. Hall measurements of the as-deposited FZO thin films were investigated, and then the electrical properties were used to find the deposition power causing the FZO thin films with minimum resistance. The FZO thin films with minimum resistance were further treated by H2 plasma and then found their variations in the electrical properties by Hall measurements. Hydrochloric (HCl) acid solutions with different concentrations (0.1%, 0.2%, and 0.5%) were used to etch the surfaces of the FZO thin films. Finally, the as-deposited, HCl-etched as-deposited, and HCl-etched H2-plasma-treated FZO thin films were used as transparent electrodes to fabricate the p-i-n α-Si:H thin film solar cells and their characteristics were compared in this study. We would show that using H2-plasma-treated and HCl-etched FZO thin films as transparent electrodes would improve the efficiency of the fabricated thin film solar cells.http://dx.doi.org/10.1155/2014/425057
spellingShingle Fang-Hsing Wang
Shang-Chao Hung
Cheng-Fu Yang
Yen-Hsien Lee
Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
International Journal of Photoenergy
title Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
title_full Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
title_fullStr Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
title_full_unstemmed Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
title_short Effects of Hydrogen Plasma on the Electrical Properties of F-Doped ZnO Thin Films and p-i-n α-Si:H Thin Film Solar Cells
title_sort effects of hydrogen plasma on the electrical properties of f doped zno thin films and p i n α si h thin film solar cells
url http://dx.doi.org/10.1155/2014/425057
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AT shangchaohung effectsofhydrogenplasmaontheelectricalpropertiesoffdopedznothinfilmsandpinasihthinfilmsolarcells
AT chengfuyang effectsofhydrogenplasmaontheelectricalpropertiesoffdopedznothinfilmsandpinasihthinfilmsolarcells
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