A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformat...
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| Main Authors: | Rui-Jun Li, Zhen-Xin Chang, Ying-Jun Lei, Zhen-Ying Cheng, Xin Liu, Kuang-Chao Fan, Jing Lv |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8624450/ |
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