A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformat...
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| Format: | Article |
| Language: | English |
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IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/8624450/ |
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| author | Rui-Jun Li Zhen-Xin Chang Ying-Jun Lei Zhen-Ying Cheng Xin Liu Kuang-Chao Fan Jing Lv |
| author_facet | Rui-Jun Li Zhen-Xin Chang Ying-Jun Lei Zhen-Ying Cheng Xin Liu Kuang-Chao Fan Jing Lv |
| author_sort | Rui-Jun Li |
| collection | DOAJ |
| description | A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10<sup>–4</sup> g, and a working frequency range of 1–10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10<sup>–4</sup> g (<italic>K</italic> = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields. |
| format | Article |
| id | doaj-art-ba2e929916cb419f86c19054a214587f |
| institution | Kabale University |
| issn | 1943-0655 |
| language | English |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-ba2e929916cb419f86c19054a214587f2025-08-20T03:32:57ZengIEEEIEEE Photonics Journal1943-06552019-01-0111111210.1109/JPHOT.2019.28946908624450A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus ProbeRui-Jun Li0https://orcid.org/0000-0002-3743-6567Zhen-Xin Chang1Ying-Jun Lei2https://orcid.org/0000-0001-9482-9976Zhen-Ying Cheng3https://orcid.org/0000-0002-0043-5528Xin Liu4Kuang-Chao Fan5Jing Lv6School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaChina National Accreditation Service for Conformity Assessment, Beijing, ChinaA new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10<sup>–4</sup> g, and a working frequency range of 1–10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10<sup>–4</sup> g (<italic>K</italic> = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.https://ieeexplore.ieee.org/document/8624450/Accelerometerleaf springfocus probemicro vibrationand uncertainty |
| spellingShingle | Rui-Jun Li Zhen-Xin Chang Ying-Jun Lei Zhen-Ying Cheng Xin Liu Kuang-Chao Fan Jing Lv A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe IEEE Photonics Journal Accelerometer leaf spring focus probe micro vibration and uncertainty |
| title | A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe |
| title_full | A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe |
| title_fullStr | A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe |
| title_full_unstemmed | A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe |
| title_short | A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe |
| title_sort | low frequency micro accelerometer based on three lobed leaf spring and a focus probe |
| topic | Accelerometer leaf spring focus probe micro vibration and uncertainty |
| url | https://ieeexplore.ieee.org/document/8624450/ |
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