A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformat...

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Main Authors: Rui-Jun Li, Zhen-Xin Chang, Ying-Jun Lei, Zhen-Ying Cheng, Xin Liu, Kuang-Chao Fan, Jing Lv
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8624450/
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author Rui-Jun Li
Zhen-Xin Chang
Ying-Jun Lei
Zhen-Ying Cheng
Xin Liu
Kuang-Chao Fan
Jing Lv
author_facet Rui-Jun Li
Zhen-Xin Chang
Ying-Jun Lei
Zhen-Ying Cheng
Xin Liu
Kuang-Chao Fan
Jing Lv
author_sort Rui-Jun Li
collection DOAJ
description A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V&#x002F;g, a resolution of 3.0&#x00A0;&#x00D7;&#x00A0;10<sup>&#x2013;4</sup> g, and a working frequency range of 1&#x2013;10&#x00A0;Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0&#x00A0;&#x00D7;&#x00A0;10<sup>&#x2013;4</sup> g (<italic>K</italic> &#x003D; 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.
format Article
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institution Kabale University
issn 1943-0655
language English
publishDate 2019-01-01
publisher IEEE
record_format Article
series IEEE Photonics Journal
spelling doaj-art-ba2e929916cb419f86c19054a214587f2025-08-20T03:32:57ZengIEEEIEEE Photonics Journal1943-06552019-01-0111111210.1109/JPHOT.2019.28946908624450A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus ProbeRui-Jun Li0https://orcid.org/0000-0002-3743-6567Zhen-Xin Chang1Ying-Jun Lei2https://orcid.org/0000-0001-9482-9976Zhen-Ying Cheng3https://orcid.org/0000-0002-0043-5528Xin Liu4Kuang-Chao Fan5Jing Lv6School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaSchool of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, ChinaChina National Accreditation Service for Conformity Assessment, Beijing, ChinaA new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V&#x002F;g, a resolution of 3.0&#x00A0;&#x00D7;&#x00A0;10<sup>&#x2013;4</sup> g, and a working frequency range of 1&#x2013;10&#x00A0;Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0&#x00A0;&#x00D7;&#x00A0;10<sup>&#x2013;4</sup> g (<italic>K</italic> &#x003D; 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.https://ieeexplore.ieee.org/document/8624450/Accelerometerleaf springfocus probemicro vibrationand uncertainty
spellingShingle Rui-Jun Li
Zhen-Xin Chang
Ying-Jun Lei
Zhen-Ying Cheng
Xin Liu
Kuang-Chao Fan
Jing Lv
A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
IEEE Photonics Journal
Accelerometer
leaf spring
focus probe
micro vibration
and uncertainty
title A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
title_full A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
title_fullStr A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
title_full_unstemmed A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
title_short A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe
title_sort low frequency micro accelerometer based on three lobed leaf spring and a focus probe
topic Accelerometer
leaf spring
focus probe
micro vibration
and uncertainty
url https://ieeexplore.ieee.org/document/8624450/
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