High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator

Terahertz (THz) sensors play an essential role in terahertz sensing, and the whispering gallery mode resonator (WGMR) is one of the competitive platforms to enhance sensitivity. The traditional on-chip WGMRs are challenging with sensing degradation resulting from the deviation in practical fabricati...

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Main Authors: Zhibo Hou, Liao Chen, Xiaoyan Gao, Rongwu Liu, Yufan Du, Chi Zhang, Xiaojun Wu, Xinliang Zhang
Format: Article
Language:English
Published: AIP Publishing LLC 2024-12-01
Series:APL Photonics
Online Access:http://dx.doi.org/10.1063/5.0233142
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author Zhibo Hou
Liao Chen
Xiaoyan Gao
Rongwu Liu
Yufan Du
Chi Zhang
Xiaojun Wu
Xinliang Zhang
author_facet Zhibo Hou
Liao Chen
Xiaoyan Gao
Rongwu Liu
Yufan Du
Chi Zhang
Xiaojun Wu
Xinliang Zhang
author_sort Zhibo Hou
collection DOAJ
description Terahertz (THz) sensors play an essential role in terahertz sensing, and the whispering gallery mode resonator (WGMR) is one of the competitive platforms to enhance sensitivity. The traditional on-chip WGMRs are challenging with sensing degradation resulting from the deviation in practical fabrication. The adjustable THz sensor based on a silicon Mach–Zehnder interferometer-coupled microring resonator (MZI-MRR) is proposed and designed in this work. With the different heating power, the THz-MZI-MRR can be precisely switched between three coupling states with high repeatability. The maximum extinction ratio and Q are adjusted to 51.2 dB and 1322, respectively. The sensing characteristics of three different states are systematically demonstrated for the first time, exhibiting various unique capabilities. By adjusting the coupling state, the sensor maintains fantastic sensing ability in a larger measurement range. The proposed adjustable THz-MZI-MRR is suitable for complex and practical detection scenarios and should promote the prosperity of THz sensing.
format Article
id doaj-art-b95d7ead999a46e8925d8b2c898e4c95
institution DOAJ
issn 2378-0967
language English
publishDate 2024-12-01
publisher AIP Publishing LLC
record_format Article
series APL Photonics
spelling doaj-art-b95d7ead999a46e8925d8b2c898e4c952025-08-20T02:56:31ZengAIP Publishing LLCAPL Photonics2378-09672024-12-01912126109126109-810.1063/5.0233142High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonatorZhibo Hou0Liao Chen1Xiaoyan Gao2Rongwu Liu3Yufan Du4Chi Zhang5Xiaojun Wu6Xinliang Zhang7Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaWuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, ChinaTerahertz (THz) sensors play an essential role in terahertz sensing, and the whispering gallery mode resonator (WGMR) is one of the competitive platforms to enhance sensitivity. The traditional on-chip WGMRs are challenging with sensing degradation resulting from the deviation in practical fabrication. The adjustable THz sensor based on a silicon Mach–Zehnder interferometer-coupled microring resonator (MZI-MRR) is proposed and designed in this work. With the different heating power, the THz-MZI-MRR can be precisely switched between three coupling states with high repeatability. The maximum extinction ratio and Q are adjusted to 51.2 dB and 1322, respectively. The sensing characteristics of three different states are systematically demonstrated for the first time, exhibiting various unique capabilities. By adjusting the coupling state, the sensor maintains fantastic sensing ability in a larger measurement range. The proposed adjustable THz-MZI-MRR is suitable for complex and practical detection scenarios and should promote the prosperity of THz sensing.http://dx.doi.org/10.1063/5.0233142
spellingShingle Zhibo Hou
Liao Chen
Xiaoyan Gao
Rongwu Liu
Yufan Du
Chi Zhang
Xiaojun Wu
Xinliang Zhang
High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
APL Photonics
title High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
title_full High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
title_fullStr High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
title_full_unstemmed High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
title_short High-sensitivity integrated terahertz sensor with large dynamic range based on adjustable high-Q microring resonator
title_sort high sensitivity integrated terahertz sensor with large dynamic range based on adjustable high q microring resonator
url http://dx.doi.org/10.1063/5.0233142
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