An Electrostatically Actuated MEMS Arch Band-Pass Filter
This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Gal...
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.3233/SAV-130786 |
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| _version_ | 1832562900704690176 |
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| author | Hassen M. Ouakad |
| author_facet | Hassen M. Ouakad |
| author_sort | Hassen M. Ouakad |
| collection | DOAJ |
| description | This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response. |
| format | Article |
| id | doaj-art-b8117804e2994bf689ac47a24e2795a7 |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-b8117804e2994bf689ac47a24e2795a72025-02-03T01:21:31ZengWileyShock and Vibration1070-96221875-92032013-01-0120480981910.3233/SAV-130786An Electrostatically Actuated MEMS Arch Band-Pass FilterHassen M. Ouakad0Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals 31261, Dhahran, Kingdom of Saudi ArabiaThis work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.http://dx.doi.org/10.3233/SAV-130786 |
| spellingShingle | Hassen M. Ouakad An Electrostatically Actuated MEMS Arch Band-Pass Filter Shock and Vibration |
| title | An Electrostatically Actuated MEMS Arch Band-Pass Filter |
| title_full | An Electrostatically Actuated MEMS Arch Band-Pass Filter |
| title_fullStr | An Electrostatically Actuated MEMS Arch Band-Pass Filter |
| title_full_unstemmed | An Electrostatically Actuated MEMS Arch Band-Pass Filter |
| title_short | An Electrostatically Actuated MEMS Arch Band-Pass Filter |
| title_sort | electrostatically actuated mems arch band pass filter |
| url | http://dx.doi.org/10.3233/SAV-130786 |
| work_keys_str_mv | AT hassenmouakad anelectrostaticallyactuatedmemsarchbandpassfilter AT hassenmouakad electrostaticallyactuatedmemsarchbandpassfilter |