The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor

The a-SiC/c-Si(n) isotype heterojunction has been studied as a temperature sensor by measuring its reverse current-voltage (IR−V) and reverse voltage-temperature (V-T) characteristics, as well as its reverse current temperature dependence. The IR−V characteristics exhibit an almost constant curren...

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Main Authors: L. Magafas, N. Georgoulas, A. Thanailakis
Format: Article
Language:English
Published: Wiley 1998-01-01
Series:Active and Passive Electronic Components
Subjects:
Online Access:http://dx.doi.org/10.1155/1998/71503
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author L. Magafas
N. Georgoulas
A. Thanailakis
author_facet L. Magafas
N. Georgoulas
A. Thanailakis
author_sort L. Magafas
collection DOAJ
description The a-SiC/c-Si(n) isotype heterojunction has been studied as a temperature sensor by measuring its reverse current-voltage (IR−V) and reverse voltage-temperature (V-T) characteristics, as well as its reverse current temperature dependence. The IR−V characteristics exhibit an almost constant current, whereas the reverse current IR depends strongly on T (from 230 K up to 320K). The V-T characteristics, at different reverse currents, reveal a highly temperature sensitive behavior for the a-SiC/c-Si(n) junction. The measured values of temperature sensitivity (Δ V/ΔT)max was found to be (≅−2.5 V/K) in the moderate temperature range, which are much higher than those obtained with bulk semiconductor temperature sensors. The high sensitivity-temperature- range of the a-SiC/c-Si(n) heterojunctions can be controlled electrically within the regim of values from 230 K up to 320 K. Finally, the high sensitivity of these devices, in conjunction with the fact that a-SiC films can be used as an add-on to the existing Si technology, emerge new possibilities to the fabrication of high sensitivity temperature microsensors.
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spelling doaj-art-b569546527ff487980926cf16cd441ce2025-08-20T03:39:26ZengWileyActive and Passive Electronic Components0882-75161563-50311998-01-0120422523410.1155/1998/71503The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature SensorL. Magafas0N. Georgoulas1A. Thanailakis2Laboratory of Electrical and Electronic Material Technology, Department of Electrical and Computer Engineering, Democritous University of Thrace, Xanthi 67100, GreeceLaboratory of Electrical and Electronic Material Technology, Department of Electrical and Computer Engineering, Democritous University of Thrace, Xanthi 67100, GreeceLaboratory of Electrical and Electronic Material Technology, Department of Electrical and Computer Engineering, Democritous University of Thrace, Xanthi 67100, GreeceThe a-SiC/c-Si(n) isotype heterojunction has been studied as a temperature sensor by measuring its reverse current-voltage (IR−V) and reverse voltage-temperature (V-T) characteristics, as well as its reverse current temperature dependence. The IR−V characteristics exhibit an almost constant current, whereas the reverse current IR depends strongly on T (from 230 K up to 320K). The V-T characteristics, at different reverse currents, reveal a highly temperature sensitive behavior for the a-SiC/c-Si(n) junction. The measured values of temperature sensitivity (Δ V/ΔT)max was found to be (≅−2.5 V/K) in the moderate temperature range, which are much higher than those obtained with bulk semiconductor temperature sensors. The high sensitivity-temperature- range of the a-SiC/c-Si(n) heterojunctions can be controlled electrically within the regim of values from 230 K up to 320 K. Finally, the high sensitivity of these devices, in conjunction with the fact that a-SiC films can be used as an add-on to the existing Si technology, emerge new possibilities to the fabrication of high sensitivity temperature microsensors.http://dx.doi.org/10.1155/1998/71503Heterojunctiontemperature sensorsmicroelectronic devices.
spellingShingle L. Magafas
N. Georgoulas
A. Thanailakis
The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
Active and Passive Electronic Components
Heterojunction
temperature sensors
microelectronic devices.
title The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
title_full The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
title_fullStr The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
title_full_unstemmed The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
title_short The a-SiC/c-Si(n) Isotype Heterojunction as a High Sensitivity Temperature Sensor
title_sort a sic c si n isotype heterojunction as a high sensitivity temperature sensor
topic Heterojunction
temperature sensors
microelectronic devices.
url http://dx.doi.org/10.1155/1998/71503
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