The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties

Vanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 45...

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Bibliographic Details
Main Authors: Velaphi Msomi, Oaisin Nemraoui
Format: Article
Language:English
Published: Academy of Science of South Africa 2010-11-01
Series:South African Journal of Science
Subjects:
Online Access:https://sajs.co.za/article/view/10102
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