Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD) is an upcoming deposition technique suitable for a variety of materials and combines the benefits of a regular atomic layer deposition with a significantly increased deposition rate at ambient conditions. In this work, amorphous and anat...

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Main Authors: Eugen Zimmermann, Ka Kan Wong, Tobias Seewald, Julian Kalb, Jonathan Linke, Giso Hahn, Lukas Schmidt-Mende
Format: Article
Language:English
Published: Wiley 2022-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2022/1172871
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author Eugen Zimmermann
Ka Kan Wong
Tobias Seewald
Julian Kalb
Jonathan Linke
Giso Hahn
Lukas Schmidt-Mende
author_facet Eugen Zimmermann
Ka Kan Wong
Tobias Seewald
Julian Kalb
Jonathan Linke
Giso Hahn
Lukas Schmidt-Mende
author_sort Eugen Zimmermann
collection DOAJ
description Atmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD) is an upcoming deposition technique suitable for a variety of materials and combines the benefits of a regular atomic layer deposition with a significantly increased deposition rate at ambient conditions. In this work, amorphous and anatase TiO2 layers are fabricated by AP-SALD via systematic variation of process conditions such as temperature, reactant (H2O and O3), and posttreatment. The formed layers are characterized for their structural and optoelectronic properties and utilized as a hole-blocking layer in hybrid perovskite solar cells. It is found that TiO2 layers fabricated at elevated deposition temperatures possess strong anatase character but expose an unfavorable interface to the perovskite layer, promoting recombination and lowering the shunt resistance and open circuit voltage of the solar cells. Therefore, the interface is essential for efficient charge extraction, which can be significantly improved by controlling the process parameters.
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issn 1687-529X
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publishDate 2022-01-01
publisher Wiley
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series International Journal of Photoenergy
spelling doaj-art-b303270c2f924720b27c9163aa163e752025-02-03T00:59:38ZengWileyInternational Journal of Photoenergy1687-529X2022-01-01202210.1155/2022/1172871Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell EfficiencyEugen Zimmermann0Ka Kan Wong1Tobias Seewald2Julian Kalb3Jonathan Linke4Giso Hahn5Lukas Schmidt-Mende6Hybrid-NanostructuresHybrid-NanostructuresHybrid-NanostructuresHybrid-NanostructuresPhotovolatics DivisionPhotovolatics DivisionHybrid-NanostructuresAtmospheric Pressure Spatial Atomic Layer Deposition (AP-SALD) is an upcoming deposition technique suitable for a variety of materials and combines the benefits of a regular atomic layer deposition with a significantly increased deposition rate at ambient conditions. In this work, amorphous and anatase TiO2 layers are fabricated by AP-SALD via systematic variation of process conditions such as temperature, reactant (H2O and O3), and posttreatment. The formed layers are characterized for their structural and optoelectronic properties and utilized as a hole-blocking layer in hybrid perovskite solar cells. It is found that TiO2 layers fabricated at elevated deposition temperatures possess strong anatase character but expose an unfavorable interface to the perovskite layer, promoting recombination and lowering the shunt resistance and open circuit voltage of the solar cells. Therefore, the interface is essential for efficient charge extraction, which can be significantly improved by controlling the process parameters.http://dx.doi.org/10.1155/2022/1172871
spellingShingle Eugen Zimmermann
Ka Kan Wong
Tobias Seewald
Julian Kalb
Jonathan Linke
Giso Hahn
Lukas Schmidt-Mende
Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
International Journal of Photoenergy
title Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
title_full Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
title_fullStr Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
title_full_unstemmed Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
title_short Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency
title_sort controlled crystallinity of tio2 layers grown by atmospheric pressure spatial atomic layer deposition and their impact on perovskite solar cell efficiency
url http://dx.doi.org/10.1155/2022/1172871
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