A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches
MEMS stiffness-tunable devices, owing to their low resonant frequency and high sensitivity, have been widely adopted in fields such as biological force sensing, vibration sensing, and inertial sensing. However, traditional stress-effect-based stiffness-adjustment methods offer limited tuning range....
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MDPI AG
2025-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/4/397 |
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| author | Tongtian Zhang Junhui Wu Guangya Zhou |
| author_facet | Tongtian Zhang Junhui Wu Guangya Zhou |
| author_sort | Tongtian Zhang |
| collection | DOAJ |
| description | MEMS stiffness-tunable devices, owing to their low resonant frequency and high sensitivity, have been widely adopted in fields such as biological force sensing, vibration sensing, and inertial sensing. However, traditional stress-effect-based stiffness-adjustment methods offer limited tuning range. This paper introduces a novel stiffness-tuning mechanism based on the principle of stiffness compensation, integrating positive stiffness springs with V-shaped negative stiffness springs in a parallel configuration. A self-locking mechanism enables precise control of the mechanical preloading on the negative stiffness structures to realize stiffness adjustment. This design is prototyped by microscale fabrication techniques and is suitable for miniaturization. The experimental results confirm a stiffness reduction of over 90% and demonstrate bistability. These findings highlight the potential of the design for high-sensitivity MEMS accelerometers and dual-mode optical switches with low switching voltage. |
| format | Article |
| id | doaj-art-b296bf14ec3e4e11ba8e4b95a4de3250 |
| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-b296bf14ec3e4e11ba8e4b95a4de32502025-08-20T03:13:55ZengMDPI AGMicromachines2072-666X2025-03-0116439710.3390/mi16040397A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical SwitchesTongtian Zhang0Junhui Wu1Guangya Zhou2Department of Mechanical Engineering, National University of Singapore, Singapore 117575, SingaporeDepartment of Mechanical Engineering, National University of Singapore, Singapore 117575, SingaporeDepartment of Mechanical Engineering, National University of Singapore, Singapore 117575, SingaporeMEMS stiffness-tunable devices, owing to their low resonant frequency and high sensitivity, have been widely adopted in fields such as biological force sensing, vibration sensing, and inertial sensing. However, traditional stress-effect-based stiffness-adjustment methods offer limited tuning range. This paper introduces a novel stiffness-tuning mechanism based on the principle of stiffness compensation, integrating positive stiffness springs with V-shaped negative stiffness springs in a parallel configuration. A self-locking mechanism enables precise control of the mechanical preloading on the negative stiffness structures to realize stiffness adjustment. This design is prototyped by microscale fabrication techniques and is suitable for miniaturization. The experimental results confirm a stiffness reduction of over 90% and demonstrate bistability. These findings highlight the potential of the design for high-sensitivity MEMS accelerometers and dual-mode optical switches with low switching voltage.https://www.mdpi.com/2072-666X/16/4/397stiffness adjustmentMEMStunable stiffnesscompliant mechanism |
| spellingShingle | Tongtian Zhang Junhui Wu Guangya Zhou A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches Micromachines stiffness adjustment MEMS tunable stiffness compliant mechanism |
| title | A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches |
| title_full | A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches |
| title_fullStr | A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches |
| title_full_unstemmed | A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches |
| title_short | A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches |
| title_sort | micromechanical wide range stiffness tuning mechanism for mems optical switches |
| topic | stiffness adjustment MEMS tunable stiffness compliant mechanism |
| url | https://www.mdpi.com/2072-666X/16/4/397 |
| work_keys_str_mv | AT tongtianzhang amicromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches AT junhuiwu amicromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches AT guangyazhou amicromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches AT tongtianzhang micromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches AT junhuiwu micromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches AT guangyazhou micromechanicalwiderangestiffnesstuningmechanismformemsopticalswitches |