Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors

This study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in d...

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Main Authors: Hyeon-Seo Do, Ik-Jyae Kim, Jiwoung Choi, Jang-Sik Lee
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/11053969/
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author Hyeon-Seo Do
Ik-Jyae Kim
Jiwoung Choi
Jang-Sik Lee
author_facet Hyeon-Seo Do
Ik-Jyae Kim
Jiwoung Choi
Jang-Sik Lee
author_sort Hyeon-Seo Do
collection DOAJ
description This study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in device performance. The application of a high-voltage recovery pulse effectively reverses the charge state of these vacancies from positive to neutral and redistributes them uniformly across the device, restoring its performance. This recovery process is analogous to the ‘wake-up’ state of the device, demonstrating its potential to restore electrical performance. The results of this study emphasize the importance of controlling the charge state and distribution of oxygen vacancies in the central region to enhance the durability and functionality of ferroelectric devices. This work provides a pathway for the broader and more effective application of ferroelectric materials in advanced semiconductor devices.
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institution DOAJ
issn 2168-6734
language English
publishDate 2025-01-01
publisher IEEE
record_format Article
series IEEE Journal of the Electron Devices Society
spelling doaj-art-b08922c8a8654c67b18d68777b4a449b2025-08-20T03:17:46ZengIEEEIEEE Journal of the Electron Devices Society2168-67342025-01-011356656910.1109/JEDS.2025.358393111053969Unraveling the Origins of Fatigue in Hafnia Ferroelectric CapacitorsHyeon-Seo Do0https://orcid.org/0009-0006-3232-954XIk-Jyae Kim1https://orcid.org/0000-0002-7560-6811Jiwoung Choi2https://orcid.org/0009-0003-3385-9233Jang-Sik Lee3https://orcid.org/0000-0002-1096-1783Department of Semiconductor Engineering, Pohang University of Science and Technology, Pohang, South KoreaDepartment of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, South KoreaDepartment of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, South KoreaDepartment of Semiconductor Engineering, Pohang University of Science and Technology, Pohang, South KoreaThis study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in device performance. The application of a high-voltage recovery pulse effectively reverses the charge state of these vacancies from positive to neutral and redistributes them uniformly across the device, restoring its performance. This recovery process is analogous to the ‘wake-up’ state of the device, demonstrating its potential to restore electrical performance. The results of this study emphasize the importance of controlling the charge state and distribution of oxygen vacancies in the central region to enhance the durability and functionality of ferroelectric devices. This work provides a pathway for the broader and more effective application of ferroelectric materials in advanced semiconductor devices.https://ieeexplore.ieee.org/document/11053969/Ferroelectric materialsferroelectric memoriesferroelectric capacitorsreliabilityfatigueoxygen vacancy
spellingShingle Hyeon-Seo Do
Ik-Jyae Kim
Jiwoung Choi
Jang-Sik Lee
Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
IEEE Journal of the Electron Devices Society
Ferroelectric materials
ferroelectric memories
ferroelectric capacitors
reliability
fatigue
oxygen vacancy
title Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
title_full Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
title_fullStr Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
title_full_unstemmed Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
title_short Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
title_sort unraveling the origins of fatigue in hafnia ferroelectric capacitors
topic Ferroelectric materials
ferroelectric memories
ferroelectric capacitors
reliability
fatigue
oxygen vacancy
url https://ieeexplore.ieee.org/document/11053969/
work_keys_str_mv AT hyeonseodo unravelingtheoriginsoffatigueinhafniaferroelectriccapacitors
AT ikjyaekim unravelingtheoriginsoffatigueinhafniaferroelectriccapacitors
AT jiwoungchoi unravelingtheoriginsoffatigueinhafniaferroelectriccapacitors
AT jangsiklee unravelingtheoriginsoffatigueinhafniaferroelectriccapacitors