Sun, S., Ma, D., Ye, B., Liu, G., Luo, N., & Huang, H. Ultra-Thin Al<sub>2</sub>O<sub>3</sub> Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors. MDPI AG.
Chicago Style (17th ed.) CitationSun, Shiwei, Dinghao Ma, Boxi Ye, Guanshun Liu, Nanting Luo, and Hao Huang. Ultra-Thin Al<sub>2</sub>O<sub>3</sub> Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors. MDPI AG.
MLA (9th ed.) CitationSun, Shiwei, et al. Ultra-Thin Al<sub>2</sub>O<sub>3</sub> Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors. MDPI AG.
Warning: These citations may not always be 100% accurate.