Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials
During the thermal analysis of hazardous materials, the thermal instruments available may face the risk of contamination within heating chambers or damage to the instruments themselves. Herein, this work introduces an innovative detection technology that combines thermogravimetric and differential t...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-05-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/25/10/3004 |
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| author | Yuhang Yang Xinyu Li Zechun Li Ming Li Ying Chen Shaokui Tan Haitao Yu Pengcheng Xu Xinxin Li |
| author_facet | Yuhang Yang Xinyu Li Zechun Li Ming Li Ying Chen Shaokui Tan Haitao Yu Pengcheng Xu Xinxin Li |
| author_sort | Yuhang Yang |
| collection | DOAJ |
| description | During the thermal analysis of hazardous materials, the thermal instruments available may face the risk of contamination within heating chambers or damage to the instruments themselves. Herein, this work introduces an innovative detection technology that combines thermogravimetric and differential thermal analysis with an integrated MEMS cantilever. Integrating polysilicon thermocouples and a heat-driven resistor into a single resonant cantilever achieves remarkable precision with a mass resolution of 5.5 picograms and a temperature resolution of 0.0082 °C. Validated through the thermal analysis of nylon 6, the cantilever excels in detecting nanogram-level samples, making it ideal for analyzing hazardous materials like ammonium perchlorate and TNT. Notably, it has successfully observed the evaporation of TNT in an air atmosphere. The integrated MEMS cantilever detection chip offers a groundbreaking micro-quantification solution for hazardous material analysis, significantly enhancing safety and opening new avenues for application. |
| format | Article |
| id | doaj-art-afe7f955d22949099d5ef708a897b1d0 |
| institution | DOAJ |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj-art-afe7f955d22949099d5ef708a897b1d02025-08-20T03:12:15ZengMDPI AGSensors1424-82202025-05-012510300410.3390/s25103004Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous MaterialsYuhang Yang0Xinyu Li1Zechun Li2Ming Li3Ying Chen4Shaokui Tan5Haitao Yu6Pengcheng Xu7Xinxin Li8State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaShanghai Aerospace Electronic and Communication Equipment Research Institute, Shanghai 201109, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, ChinaDuring the thermal analysis of hazardous materials, the thermal instruments available may face the risk of contamination within heating chambers or damage to the instruments themselves. Herein, this work introduces an innovative detection technology that combines thermogravimetric and differential thermal analysis with an integrated MEMS cantilever. Integrating polysilicon thermocouples and a heat-driven resistor into a single resonant cantilever achieves remarkable precision with a mass resolution of 5.5 picograms and a temperature resolution of 0.0082 °C. Validated through the thermal analysis of nylon 6, the cantilever excels in detecting nanogram-level samples, making it ideal for analyzing hazardous materials like ammonium perchlorate and TNT. Notably, it has successfully observed the evaporation of TNT in an air atmosphere. The integrated MEMS cantilever detection chip offers a groundbreaking micro-quantification solution for hazardous material analysis, significantly enhancing safety and opening new avenues for application.https://www.mdpi.com/1424-8220/25/10/3004MEMSresonant cantileverTGADTAthermal analysis |
| spellingShingle | Yuhang Yang Xinyu Li Zechun Li Ming Li Ying Chen Shaokui Tan Haitao Yu Pengcheng Xu Xinxin Li Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials Sensors MEMS resonant cantilever TGA DTA thermal analysis |
| title | Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials |
| title_full | Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials |
| title_fullStr | Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials |
| title_full_unstemmed | Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials |
| title_short | Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials |
| title_sort | integrated microcantilever for joint thermal analysis of trace hazardous materials |
| topic | MEMS resonant cantilever TGA DTA thermal analysis |
| url | https://www.mdpi.com/1424-8220/25/10/3004 |
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