Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such...
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Language: | English |
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Wiley
2020-01-01
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Series: | International Journal of Photoenergy |
Online Access: | http://dx.doi.org/10.1155/2020/6686797 |
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author | Pang-Kai Liu Yu-Lun Cheng Likarn Wang |
author_facet | Pang-Kai Liu Yu-Lun Cheng Likarn Wang |
author_sort | Pang-Kai Liu |
collection | DOAJ |
description | We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such passivation layers proved to be increased with respect to those untreated, and the resultant PERC cells showed a performance improvement compared with standard cells with full back surface fields. |
format | Article |
id | doaj-art-ae0cd33d87154fe894f399d8ce3d38cc |
institution | Kabale University |
issn | 1110-662X 1687-529X |
language | English |
publishDate | 2020-01-01 |
publisher | Wiley |
record_format | Article |
series | International Journal of Photoenergy |
spelling | doaj-art-ae0cd33d87154fe894f399d8ce3d38cc2025-02-03T06:00:49ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2020-01-01202010.1155/2020/66867976686797Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear SidePang-Kai Liu0Yu-Lun Cheng1Likarn Wang2Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanInstitute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanInstitute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanWe present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such passivation layers proved to be increased with respect to those untreated, and the resultant PERC cells showed a performance improvement compared with standard cells with full back surface fields.http://dx.doi.org/10.1155/2020/6686797 |
spellingShingle | Pang-Kai Liu Yu-Lun Cheng Likarn Wang Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side International Journal of Photoenergy |
title | Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side |
title_full | Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side |
title_fullStr | Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side |
title_full_unstemmed | Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side |
title_short | Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side |
title_sort | crystalline silicon perc solar cell with ozonized alox passivation layer on the rear side |
url | http://dx.doi.org/10.1155/2020/6686797 |
work_keys_str_mv | AT pangkailiu crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside AT yuluncheng crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside AT likarnwang crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside |