High piezoelectric property with exceptional stability in self-poled ferroelectric films

High piezoelectric property with exceptional stability in self-poled ferroelectric films

Abstract Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remai...

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Main Authors: Lisha Liu, Jiaojiao Yi, Kun Xu, Zhen Liu, Mingmeng Tang, Le Dai, Xuan Gao, Yang Liu, Shuhao Wang, Zhang Zhang, Liang Shu, Jing-Feng Li, Shujun Zhang, Yaojin Wang
Format: Article
Language:English
Published: Nature Portfolio 2024-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-54707-y
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