Regularities of Structure Formation of Coatings CrN, Obtained by Vacuum Arc Evaporation in a Nitrogen Atmosphere
The questions of structural engineering of Cr-N system coatings produced by vacuum arc evaporation of Cr cathode in a nitrogen atmosphere are considered. As the variable physical and technological parameters we have used the following ones: pressure of nitrogen atmosphere (3.5…48)×10–4 Torr and nega...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-03-01
|
| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01026.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|