Regularities of Structure Formation of Coatings CrN, Obtained by Vacuum Arc Evaporation in a Nitrogen Atmosphere
The questions of structural engineering of Cr-N system coatings produced by vacuum arc evaporation of Cr cathode in a nitrogen atmosphere are considered. As the variable physical and technological parameters we have used the following ones: pressure of nitrogen atmosphere (3.5…48)×10–4 Torr and nega...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-03-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01026.pdf |
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| Summary: | The questions of structural engineering of Cr-N system coatings produced by vacuum arc evaporation of Cr cathode in a nitrogen atmosphere are considered. As the variable physical and technological parameters we have used the following ones: pressure of nitrogen atmosphere (3.5…48)×10–4 Torr and negative bias potential applied to the substrate in constant (Ub = – 120 V) and pulse (Uip = – 1200 V) modes. Increase in the pressure without pulse action allows to transfer from Cr + Cr2N phase to phase of textured CrN crystallites with [111] axis. The transition from the metallic phase to the mechanical nitride is accompanied by a decrease in the average size of crystallites. Additional supply of impulse capacity allows to intensify the process of formation of nitrides and stimulates formation at high pressure of radiation-resistant texture units with the [110] axis. |
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| ISSN: | 2077-6772 |