One-Step Fabrication of 2.5D CuMoO<sub>x</sub> Interdigital Microelectrodes Using Numerically Controlled Electric Discharge Machining for Coplanar Micro-Supercapacitors

One-Step Fabrication of 2.5D CuMoO<sub>x</sub> Interdigital Microelectrodes Using Numerically Controlled Electric Discharge Machining for Coplanar Micro-Supercapacitors

With the increasing market demands for wearable and portable electronic devices, binary metal oxides (BMOs) with a remarkable capacity and good structure stability have been considered as a promising candidate for fabricating coplanar micro-supercapacitors (CMSCs), serving as the power source. Howev...

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Bibliographic Details
Main Authors: Shunqi Yang, Ri Chen, Fu Huang, Wenxia Wang, Igor Zhitomirsky
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Micromachines
Subjects:
coplanar micro-supercapacitors
numerically controlled electric discharging machining
binary metal oxides
machining voltage
CuMoO<sub>x</sub>
Online Access:https://www.mdpi.com/2072-666X/15/11/1319
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