Theoretical investigation of bulk acoustic waves with high electromechanical coupling coefficient in c-axis-tilted wurtzite ScAlN
Scandium aluminum nitride (ScAlN) has gained significant attention as a piezoelectric material for bulk acoustic wave (BAW) resonators, offering a promising alternative to conventional aluminum nitride (AlN) due to its superior piezoelectric properties. Recent advancements in ScAlN film fabrication...
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2025-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0256428 |
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