Influence of Elements on the Corrosion Resistance of DLC Films
Pure DLC, Si-DLC, and Si-N-DLC films deposited from C2H2, C2H2 : TMS and C2H2 : TMS : N2 mixtures were used to study the effects of the elemental contents (silicon, silicon-nitrogen) on deposition and corrosion resistance properties. The films were prepared on Si (100) wafers using the plasma-based...
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| Format: | Article |
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Wiley
2017-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2017/3571454 |
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| author | Nutthanun Moolsradoo Shuichi Watanabe |
| author_facet | Nutthanun Moolsradoo Shuichi Watanabe |
| author_sort | Nutthanun Moolsradoo |
| collection | DOAJ |
| description | Pure DLC, Si-DLC, and Si-N-DLC films deposited from C2H2, C2H2 : TMS and C2H2 : TMS : N2 mixtures were used to study the effects of the elemental contents (silicon, silicon-nitrogen) on deposition and corrosion resistance properties. The films were prepared on Si (100) wafers using the plasma-based ion implantation (PBII) technique. The film structure was analyzed using Raman spectroscopy. The composition at the top surface of the films was measured using energy dispersive X-ray spectroscopy (EDS). The hardness and elastic modulus of the films were measured using a nanoindentation hardness tester. The corrosion performance of the films was conducted using potentiodynamic polarization experiments in an aqueous 0.05 M NaCl solution. The results indicate that the hardness and corrosion resistance of the Si-DLC film increase as the silicon content increases. This is due to the increase of the sp3 cluster. The corrosion resistance of a pure DLC film increases when silicon and silicon-nitrogen are doped into the film. Si-DLC films with a silicon content of 40 at.% had a corrosion potential value of 0.61 V, while a Si-N-DLC film with a silicon and nitrogen content of 19.3 at.% and 1 at.% shows a corrosion potential value of 0.85 V, which is a considerable improvement in the corrosion resistance property. |
| format | Article |
| id | doaj-art-a94d2fa7c54a475bac12fa63acd2c92f |
| institution | OA Journals |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2017-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-a94d2fa7c54a475bac12fa63acd2c92f2025-08-20T02:20:33ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422017-01-01201710.1155/2017/35714543571454Influence of Elements on the Corrosion Resistance of DLC FilmsNutthanun Moolsradoo0Shuichi Watanabe1King Mongkut’s University of Technology Thonburi, Bangkok 10140, ThailandNippon Institute of Technology, Saitama 345-8501, JapanPure DLC, Si-DLC, and Si-N-DLC films deposited from C2H2, C2H2 : TMS and C2H2 : TMS : N2 mixtures were used to study the effects of the elemental contents (silicon, silicon-nitrogen) on deposition and corrosion resistance properties. The films were prepared on Si (100) wafers using the plasma-based ion implantation (PBII) technique. The film structure was analyzed using Raman spectroscopy. The composition at the top surface of the films was measured using energy dispersive X-ray spectroscopy (EDS). The hardness and elastic modulus of the films were measured using a nanoindentation hardness tester. The corrosion performance of the films was conducted using potentiodynamic polarization experiments in an aqueous 0.05 M NaCl solution. The results indicate that the hardness and corrosion resistance of the Si-DLC film increase as the silicon content increases. This is due to the increase of the sp3 cluster. The corrosion resistance of a pure DLC film increases when silicon and silicon-nitrogen are doped into the film. Si-DLC films with a silicon content of 40 at.% had a corrosion potential value of 0.61 V, while a Si-N-DLC film with a silicon and nitrogen content of 19.3 at.% and 1 at.% shows a corrosion potential value of 0.85 V, which is a considerable improvement in the corrosion resistance property.http://dx.doi.org/10.1155/2017/3571454 |
| spellingShingle | Nutthanun Moolsradoo Shuichi Watanabe Influence of Elements on the Corrosion Resistance of DLC Films Advances in Materials Science and Engineering |
| title | Influence of Elements on the Corrosion Resistance of DLC Films |
| title_full | Influence of Elements on the Corrosion Resistance of DLC Films |
| title_fullStr | Influence of Elements on the Corrosion Resistance of DLC Films |
| title_full_unstemmed | Influence of Elements on the Corrosion Resistance of DLC Films |
| title_short | Influence of Elements on the Corrosion Resistance of DLC Films |
| title_sort | influence of elements on the corrosion resistance of dlc films |
| url | http://dx.doi.org/10.1155/2017/3571454 |
| work_keys_str_mv | AT nutthanunmoolsradoo influenceofelementsonthecorrosionresistanceofdlcfilms AT shuichiwatanabe influenceofelementsonthecorrosionresistanceofdlcfilms |