Synthesis and Nanoscale Characterization of LiNbO3 Thin Films Deposited on Al2O3 Substrate by RF Magnetron Sputtering under Electric Field
LiNbO3 thin films were deposited on Al2O3 substrates by RF-magnetron sputtering with in-situ electric field to study the self-polarization effect. The films have been characterized crystallographically by x-ray diffraction, and morphologically by atomic force microscopy. The films contain crystallit...
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| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2016-11-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2016/4/articles/jnep_2016_V8_04025.pdf |
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