Micro-Assembly Error Control of Specialized MEMS Friction Sensor
A skin friction sensor is a three-dimensional MEMS sensor specially designed for measuring the skin friction of hypersonic vehicle models. The accuracy of skin friction measurement under hypersonic laminar flow conditions is closely related to the fabrication and micro-assembly accuracy of MEMS skin...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/2/142 |
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