Integrated structure and sensorless feedback control of unimorph piezoelectric deformable mirrors
Deformable mirrors are essential dynamic wavefront compensation. Among the various types of deformable mirrors with different actuation mechanisms, the unimorph piezoelectric deformable mirror (UPDM) offers distinct advantages owing to its compact size and low cost. The two most critical challenges...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Light Publishing Group
2025-04-01
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| Series: | Light: Advanced Manufacturing |
| Subjects: | |
| Online Access: | https://www.light-am.com/article/doi/10.37188/lam.2025.025 |
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| Summary: | Deformable mirrors are essential dynamic wavefront compensation. Among the various types of deformable mirrors with different actuation mechanisms, the unimorph piezoelectric deformable mirror (UPDM) offers distinct advantages owing to its compact size and low cost. The two most critical challenges in UPDM are electrode fabrication and deformation control. This study proposes an integrated electrode fabrication and sensorless feedback control scheme for UPDM, which simplifies the manufacturing process and enhances its performance. The electrode array is created using silkscreen printing combined with flexible printed circuit board technology, integrating electrode fabrication and electrical connection into a single step. The desired mirror deformation is achieved by introducing a closed-loop direct deformation control method based on piezoelectric self-sensing. The feedback mechanism utilizes the local strain-induced charge generated by the piezoelectric plate, effectively addressing the nonlinear behavior of the piezoelectric material. Experimental results confirm the feasibility and effectiveness of the proposed method, with the maximum relative error in the steady state phase remaining below 2%. |
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| ISSN: | 2689-9620 |